Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
0 | lotA0 | MFC2Flow_STEP_MEAN | 75.03125 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
1 | lotA0 | MFC5Flow_STEP_MEAN | 81.068263 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
2 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.998871 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
3 | lotA0 | UPC1-Flow_STEP_MEAN | 693.075212 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
4 | lotA0 | MFCGFlow_STEP_MEAN | 74.995839 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
5 | lotA0 | MFCJFlow_STEP_MEAN | 60.050699 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
6 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
7 | lotA0 | MFCEFlow_STEP_MEAN | 81.079901 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
8 | lotA0 | MFCKFlow_STEP_MEAN | 60.042968 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
9 | lotA0 | MFCXFlow_STEP_MEAN | 0.002235 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
10 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.970492 | RecipeC0 | WaferB0 | 10 | 2023-01-01 01:19:32.272 |
11 | lotA0 | ThrottleValveAngle_STEP_MEAN | 6 | RecipeC0 | WaferB0 | 7 | 2023-01-01 01:19:37.269 |
12 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.975098 | RecipeC0 | WaferB0 | 7 | 2023-01-01 01:19:37.269 |
13 | lotA0 | UPC1-Flow_STEP_MEAN | 160.400389 | RecipeC0 | WaferB0 | 7 | 2023-01-01 01:19:37.269 |
14 | lotA0 | UPC1-Flow_STEP_MEAN | -2.416992 | RecipeC0 | WaferB0 | 8 | 2023-01-01 01:19:39.279 |
15 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.997071 | RecipeC0 | WaferB0 | 8 | 2023-01-01 01:19:39.279 |
16 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.970984 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
17 | lotA0 | MFCNFlow_STEP_MEAN | 134.935338 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
18 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
19 | lotA0 | MFC5Flow_STEP_MEAN | 81.070509 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
20 | lotA0 | MFCJFlow_STEP_MEAN | 60.055338 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
21 | lotA0 | UPC1-Flow_STEP_MEAN | 684.538296 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
22 | lotA0 | MFCEFlow_STEP_MEAN | 81.06765 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
23 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.998991 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
24 | lotA0 | MFCGFlow_STEP_MEAN | 74.99871 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
25 | lotA0 | MFC2Flow_STEP_MEAN | 75.032446 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
26 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB1 | 10 | 2023-01-01 01:20:47.457 |
27 | lotA0 | UPC1-Flow_STEP_MEAN | 693.89649 | RecipeC0 | WaferB1 | 12 | 2023-01-01 01:20:48.267 |
28 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.976562 | RecipeC0 | WaferB1 | 7 | 2023-01-01 01:20:53.267 |
29 | lotA0 | UPC1-Flow_STEP_MEAN | 44.912111 | RecipeC0 | WaferB1 | 7 | 2023-01-01 01:20:53.267 |
30 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB1 | 7 | 2023-01-01 01:20:53.267 |
31 | lotA0 | UPC1-Flow_STEP_MEAN | -2.636719 | RecipeC0 | WaferB1 | 8 | 2023-01-01 01:20:54.366 |
32 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB1 | 8 | 2023-01-01 01:20:54.366 |
33 | lotA0 | UPC1-Flow_STEP_MEAN | 3.955078 | RecipeC0 | WaferB2 | 9 | 2023-01-01 01:21:02.266 |
34 | lotA0 | MFC5Flow_STEP_MEAN | 81.063698 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
35 | lotA0 | UPC1-Flow_STEP_MEAN | 689.890975 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
36 | lotA0 | MFCEFlow_STEP_MEAN | 81.06714 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
37 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.995389 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
38 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
39 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.987705 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
40 | lotA0 | MFCJFlow_STEP_MEAN | 60.056682 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
41 | lotA0 | MFC2Flow_STEP_MEAN | 75.055176 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
42 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
43 | lotA0 | MFCGFlow_STEP_MEAN | 74.992968 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
44 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB2 | 10 | 2023-01-01 01:22:03.274 |
45 | lotA0 | UPC1-Flow_STEP_MEAN | 82.089846 | RecipeC0 | WaferB2 | 7 | 2023-01-01 01:22:08.264 |
46 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB2 | 7 | 2023-01-01 01:22:08.264 |
47 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.95752 | RecipeC0 | WaferB2 | 7 | 2023-01-01 01:22:08.264 |
48 | lotA0 | UPC1-Flow_STEP_MEAN | -2.856445 | RecipeC0 | WaferB2 | 8 | 2023-01-01 01:22:10.263 |
49 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.993409 | RecipeC0 | WaferB2 | 8 | 2023-01-01 01:22:10.263 |
50 | lotA0 | MFCXFlow_STEP_MEAN | 0.002235 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
51 | lotA0 | MFCJFlow_STEP_MEAN | 60.055338 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
52 | lotA0 | MFC5Flow_STEP_MEAN | 81.074567 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
53 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.998511 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
54 | lotA0 | MFCEFlow_STEP_MEAN | 81.068263 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
55 | lotA0 | MFC2Flow_STEP_MEAN | 75.055175 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
56 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
57 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
58 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.972459 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
59 | lotA0 | UPC1-Flow_STEP_MEAN | 661.290503 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
60 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB3 | 10 | 2023-01-01 01:23:18.273 |
61 | lotA0 | UPC1-Flow_STEP_MEAN | 115.224607 | RecipeC0 | WaferB3 | 7 | 2023-01-01 01:23:23.261 |
62 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.995605 | RecipeC0 | WaferB3 | 7 | 2023-01-01 01:23:23.261 |
63 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB3 | 7 | 2023-01-01 01:23:23.261 |
64 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB3 | 8 | 2023-01-01 01:23:25.261 |
65 | lotA0 | UPC1-Flow_STEP_MEAN | -3.076172 | RecipeC0 | WaferB3 | 8 | 2023-01-01 01:23:25.261 |
66 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB4 | 8 | 2023-01-01 01:23:35.710 |
67 | lotA0 | UPC1-Flow_STEP_MEAN | 3.515625 | RecipeC0 | WaferB4 | 8 | 2023-01-01 01:23:35.710 |
68 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
69 | lotA0 | UPC1-Flow_STEP_MEAN | 674.452482 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
70 | lotA0 | MFC5Flow_STEP_MEAN | 81.075001 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
71 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
72 | lotA0 | MFC2Flow_STEP_MEAN | 75.029754 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
73 | lotA0 | MFCJFlow_STEP_MEAN | 60.056884 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
74 | lotA0 | MFCEFlow_STEP_MEAN | 81.079902 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
75 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.997911 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
76 | lotA0 | MFCGFlow_STEP_MEAN | 74.992968 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
77 | lotA0 | MFCXFlow_STEP_MEAN | 0.006823 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
78 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.951311 | RecipeC0 | WaferB4 | 10 | 2023-01-01 01:24:36.298 |
79 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.020508 | RecipeC0 | WaferB4 | 7 | 2023-01-01 01:24:41.268 |
80 | lotA0 | UPC1-Flow_STEP_MEAN | 95.273439 | RecipeC0 | WaferB4 | 7 | 2023-01-01 01:24:41.268 |
81 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB4 | 7 | 2023-01-01 01:24:41.268 |
82 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.011719 | RecipeC0 | WaferB4 | 8 | 2023-01-01 01:24:43.268 |
83 | lotA0 | UPC1-Flow_STEP_MEAN | -3.076172 | RecipeC0 | WaferB4 | 8 | 2023-01-01 01:24:43.268 |
84 | lotA0 | UPC1-Flow_STEP_MEAN | 3.515625 | RecipeC0 | WaferB5 | 7 | 2023-01-01 01:24:53.267 |
85 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB5 | 7 | 2023-01-01 01:24:53.267 |
86 | lotA0 | MFCJFlow_STEP_MEAN | 60.055338 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
87 | lotA0 | MFCEFlow_STEP_MEAN | 81.061524 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
88 | lotA0 | UPC1-Flow_STEP_MEAN | 662.306284 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
89 | lotA0 | MFCKFlow_STEP_MEAN | 60.044514 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
90 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
91 | lotA0 | MFC5Flow_STEP_MEAN | 81.06377 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
92 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
93 | lotA0 | MFCGFlow_STEP_MEAN | 74.99871 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
94 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.998991 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
95 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.948852 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
96 | lotA0 | MFC2Flow_STEP_MEAN | 75.03125 | RecipeC0 | WaferB5 | 10 | 2023-01-01 01:25:54.345 |
97 | lotA0 | UPC1-Flow_STEP_MEAN | 82.529298 | RecipeC0 | WaferB5 | 7 | 2023-01-01 01:25:59.265 |
98 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB5 | 7 | 2023-01-01 01:25:59.265 |
99 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.975098 | RecipeC0 | WaferB5 | 7 | 2023-01-01 01:25:59.265 |
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