current flows in the wiring 16 electromagnetic waves are generated around the wiring 16 for example in the case a shield layer is not provided between wirings the wirings are affected each other by noise caused by the electromagnetic waves and data of such as an electrostatic force in which an acceleration is detected may not be normally obtained next a shield effect according to the embodiment will be described with reference to fig4 fig4 illustrates line of electric forces 18 of electromagnetic waves generated from the wirings 16 in the case where the wirings 16 and the shield layers 7 are formed on a surface of the electrode substrate 2 and a current flows in the wirings 16 in a state in which each of the wirings 16 and the shield layers 7 is electrically blocked by the space 4 according to this structure an electromagnetism from the wiring 16 can be blocked therefore even if the inside observation space 6 is formed in a part of the shield layer 7 the space is not affected by the wiring specifically a space on an outer side of the shield layer 7 disposed on both sides of the wiring 16 for example the space 6 is not affected by the electromagnetic waves this is because the electromagnetic waves generated from the wirings 16 are blocked by the shield layers 7 planarly the.