chambers are provided with locks through which the containers pass into the process chambers fig9 a and 9 b show how an arrangement for annealing or processing including coupling unit may be designed fig9 a shows a cross section through the container 17 in processing mode the container 17 has a cover 18 in the form of a transparency body 12 the base 19 consists of highly absorbent material in one embodiment the material is graphite a side wall 20 of the container 17 is a frame of the container 17 made from cfc gas inlet 31 and gas outlet 32 are integrated in the side wall of the container self closing valves 40 are likewise integrated in the side wall 20 these valves can be used to open and close the gas openings 31 and 32 for evacuating the container or filling the container with a gas a coupling unit 42 of the container of the process zone 33 is likewise integrated in the side wall the coupling unit 42 may for example be designed as a conical opening this opening is used to plug connect the container 17 to a coupling unit 41 which is formed inversely with respect to the opening of the process zones gas lines 43 are integrated in the coupling units 41 and 42 when the container has in this way been arranged with for example the process zone 33 by way of example any desired process gas can be introduced or discharged during this process stage or the processing vessel can be evacuated and purged with inert gas in the form illustrated the coupling units 42 of the container 17 and of the process zone 33 are used to produce a process gas atmosphere after the processing or annealing.