amount of resist that had to be dropped on the basis of the amount of gap between the substrate and the squeezee while the amount of gap between the substrate and the squeezee is set to 0 10 mm 0 15 mm and 0 20 mm respectively the squeezee feed speed was changed and the minimum amount of resist measured as indicated in fig1 lowering the feed speed of the squeezee decreases the minimum amount of resist that has to be dropped and furthermore this effect becomes larger for the larger amount of the gap in addition it can also be seen that for each of the gap sizes at feed speeds of 40 mm sec or more an approximately constant amount of dropped resist can make stable coating irrespective of the feed speed of the squeezee therefore in consideration of the throughput and the stability of the coating the feed speed was set at approximately 60 mm sec in the apparatus of the third embodiment fig1 is a process diagram describing the coating process of the third embodiment in this process diagram the arrows indicate 34 during motion 34 in consideration of the timing of the sensor output the first conveyor arms 144a and 146a first move from a middle position to a washing chamber.