the needle tip of the manipulator is repaired as shown in fig1 c the defect correction described above is also effective for tweezers using needles in a pair it is possible to restore the tweezers by applying correction to the respective needles note that a drive system for the tweezers is not specifically designated next an example of a defect repairing method for a tip needle of a manipulator set in a vacuum chamber 1 of an fib device according to the invention will be described an auxiliary needle 6 which can replace a needle portion when a defect occurs in the needle portion during work is created at a corner of a sample surface in advance although the needle 6 has a linear shape for convenience of later work the needle 6 is formed in a slant direction rather than a vertical direction with respect to the sample surface in an example shown in fig2 a the needle 6 is formed by a stacking system according to the cvd with the sample surface as a substrate however in order to grow a shape in the slant direction a method of sequentially shifting a position on which an ion beam is irradiated in one direction is used a slant angle increases as the position shifting speed is lowered a growth direction by the cvd can be set substantially in a directly lateral direction at the maximum but growth in a downward direction is impossible in the invention it is preferable to grow the shape at an angle of about 45 u00b0 in an example shown in fig2 b this growth in the slant direction is realized by a slant of the sample surface rather than.