areas where the lacquer structure 11 is still present then using an incineration step the cured lacquer 11 which is still present is removed step f the result thereof is shown in fig8 removing the cured lacquer which is still present can also be carried out using solvents in fig9 14 the respective steps a f are again repeated for applying a structure in a second material layer 12 which has been deposited on the previous material layer 9 and the substrate s it goes without saying that the process can be repeated a further number of times for applying an accumulation of different structures applied in successive material layers finally fig1 diagrammatically shows a number of blocks which each represent a processing station in which the various steps carried out per processing station are shown in block a 1 deposition of the material 9 on the substrate s takes place in block a 2 the deposited material is cleaned this step is not necessary for all materials in block d the lacquer is developed whereby the lighted lacquer structure is preserved and the non lighted lacquer parts are removed or vice versa in block d 2 the remaining lacquer structure is baked to cure it further in block e the excess material.