vacuum pump 31 connected with outlet 33 of enlarged portion 35 of evacuation pathway conduit 37 such connections being accomplished in any conventional manner for example utilizing flexible tubing and clamps or threaded fittings an rf generator a dc generator could be utilized 39 is connected with electrode plates a coil could also be utilized 41 and 43 as shown in fig1 through 4 apparatus 13 is preferably unitarily fabricated from a substantially transparent material for example a glass such as borosilicate glass or plastic such as lucite or other substantially inert material tubing 45 having a wall thickness sufficient to withstand the reduced pressures inherent in plasma processing upper access conduit 29 extends to enlarged portion 47 of tubing 45 which constitutes plasma formation chamber 49 therein lower access conduit 51 extends from chamber 49 to processing area 53 tubing 45 is shaped to form vertex 55 for example by bending during blowing of a glass tubing at the junction of lower access conduit 51 and lower portion 57 of evacuation conduit 37 opening 59 is formed at vertex 55 by way of example a 6 35 mm about 1 4 inch diameter tube is expanded to 50 mm about 2 inches during fabrication to form chamber 49 chamber 49 tapers back to a 6 35 mm tube at lower access conduit 51 the tubing wall in the case of.