substrate support 130 230 330 the one or more heating elements can be positioned between two ceramic pieces which are sintered together to form a monolithic piece alternatively a first layer of ceramic is thermally sprayed onto the thermal insulator followed by thermally spraying the one or more heating elements onto the first ceramic layer and followed by thermally spraying a second ceramic layer over the one or more heating elements using similar techniques other electrodes or metal layers may be inserted within the substrate support 130 230 330 for example an electrostatic clamping electrode may be inserted between ceramic layers and formed via sintering or spraying techniques as described above the one or more heating elements and the electrostatic clamping electrode may be in the same plane or in separate planes and may be implemented as separate electrodes or implemented as the same physical electrode referring now to fig5 a substrate holder is described according to another embodiment the substrate holder 400 comprises a substrate support 430 having a first temperature and configured to support a substrate 410 a temperature controlled support base 420 positioned below substrate support 430 and configured to be at a second temperature less than the first temperature e g less than a desired temperature of substrate 410 and a thermal insulator 440 disposed between the substrate support 430 and the temperature controlled support base 420 additionally the substrate support 430 comprises one or more heating elements 431 coupled.