where multiple alignment marks are positioned make the microscope configuration task very difficult even with low na lt 0 1 microscopes if the imprint field size is 26 mm by 33 mm it may be necessary to position two imaging units next to each other where their beam paths are spaced by less than 26 mm further if the two alignment marks are closer to each other the space between their corresponding imaging units needs to be smaller too in order to overcome the limited space problems alternative microscope configurations are herein disclosed fig3 illustrates two microscope units 200 with different inclined angles 8 degrees and 16 degrees by altering the inclined angles it is possible to bring their focusing points much closer as compared to the case of the same inclined angle configuration inclined angles are mainly governed by the grating pitch as shown microscope 200 at the 8 degree pitch aligns to alignment mark 302 on substrate 301 while microscope 200 at the 16 degree pitch aligns to alignment mark 303 referring to fig4 a and 4b there are illustrated two alternative microscope configurations utilizing microscope 200 with either beam offset optics prism 401 or mirrors 402 prism 401 can either off set or bend the beam path from microscope 200 so that two focusing points can be.