places an initial irradiation point within the mapping area at an irradiation point of the primary x ray 2 emitted from the x ray tubular bulb 1 the inspection sample 8 is irradiated with the primary x ray 2 from the x ray tubular bulb 1 in this state and hence the characteristic x ray 3 a and the scattered x ray 3 b thus generated are detected by the x ray detector 4 the x ray detector 4 detects the x ray and then transmits a signal thereof to the analyzer 5 and the analyzer 5 extracts an energy spectrum from the signal and outputs the extracted spectrum to the x ray mapping processing section 6 the x ray mapping processing section 6 discriminates an x ray intensity corresponding to a specific element in this embodiment lead from the energy spectrum transmitted from the analyzer 5 and stores the x ray intensity as an inspection mapping image information together with coordinate information on the irradiation point further the irradiation point is caused to be sequentially moved at predetermined distance intervals within the mapping area and is scanned in matrix that is scanned two dimensionally then the detection described above is repeated for a plurality of irradiation points over the entire mapping area and hence the information on the inspection mapping image of the respective irradiation points is stored next the x ray mapping processing section 6 determines an intensity contrast in which a color or lightness is changed in accordance with the x ray intensity obtained in the above mentioned detection by setting one irradiation point as one pixel and displays the intensity contrast.