expansion of the gas as may occur by the gas flowing through pressure reducers valves or other system components this prevents undesirable cooling and ultimately formation of liquid phase in the gas phase while the latter flows within the distribution system and hence prevents corrosion phenomena especially corrosion prompted by liquid droplet deposition this in turn increases safety and improves the productivity of the manufacturing process for the proper and safe operation of the inventive system the pressurized container and all conduits valves orifices and the like are preferably constructed from highly corrosion resistant alloys such as stainless steel hastelloy nickel and the like in order to avoid parasitic corrosion it is highly preferred to remove from the surface of these alloys any adsorbed moisture by initial subjection to high temperature about 80 u00b0 120 u00b0 c using high purity inert gas purging prior to and after any exposure to the esl and esg 39 s in addition to the above described trouble free operation of high flow rate ultra high purity delivery of esg 39 s at the point of use the usage of large volume supply has the advantage of reducing the frequency of container disconnection and reconnections which are well known to be the critical operations frequently responsible for secondary contaminations and failures or malfunctions the same principles are applicable to other esg 39.