phosphor thin film as the light emitting layer thereon and an electron beam eb vapor source 14 are disposed inside a vacuum chamber 11 the eb vapor source 14 includes a crucible 40 for housing a pellet 14 a with addition of the material functioning as the luminescence center and an electron gun 41 incorporating a filament 41 a for electron emission here in the illustrated example for the purpose of facilitating the explanation the location of the vapor source 14 may seem to deviate from a mean position with respect to the substrate however in reality the vapor source 14 is disposed in an appropriate position so as to effectuate uniform composition and film thickness of the phosphor thin film to be deposited the vacuum chamber 11 includes an exhaust port 11 a so that the inside of the vacuum chamber 11 can be set to a desired degree of vacuum by exhausting gas from this exhaust port 11 a this vacuum chamber 11 also includes a material gas inlet port 11 b for introduction of gas such as hydrogen sulfide the substrate 12 is fixed to a substrate holder 12 a a fixed shaft 12 b of this substrate holder 12 a is fixed by unillustrated rotating shaft fixing means such that the fixed shaft 12 b is rotated freely by manipulation from outside while maintaining the degree of vacuum in the vacuum chamber 11 accordingly unillustrated rotating means can freely rotate the substrate 12 at desired revolution speed as appropriate meanwhile heating means 13.