removeable and tool 206 is moved back into the original position of system 200 in another embodiment another adapter tool 210 is coupled to one end of system 200 as shown or is the metrology unit of tool 208 that is moved to the end of the process after tools 202 204 and 206 are coupled together fig2 b exemplifies the side view of wafer processing system 200 operating with an automatic material handling system 212 in this example tool adapters 208 and 210 include communications modules 208 c and 210 c respectively which communicate the location of the adapter tools in the wafer processing system to material handling system 212 material handling system 212 is coupled to a computer arrangement 214 and to a database 216 for storing information on the location of the adapter tools in the wafer processing system referring to fig3 a flowchart 300 exemplifies how the wafer processing system 200 is reconfigured in accordance with an embodiment of the present invention at block 302 the processing tools are setup for processing the wafers and at block 304 various multi tool adapters mta are provided at block 306 a wafer processing recipe is provided by way of example a wafer moves through each processing tool of system 200 as dictated by the processing recipe at 308 a determination is made whether to rearrange the processing tool setup in view of the recipe if the answer is yes the flow moves to.