alignment marks 108 a 1 108 b 1 when the mask 108 b and the disk 108 a are respectively moved in x and y directions in response to the driving control signals cs 1 cs 2 from the control unit 112 and the control unit 112 monitors the intensity of the beam detected by the photodetector 110 and stops the disk 108 a and the mask 108 b at a position where the greatest intensity of the beam is observed the greatest intensity of the beam means that the alignment marks 108 a 1 108 b 1 are most precisely aligned with each other although one alignment mark 108 b 1 is provided on the mask 108 b in this embodiment two or more alignment marks 108 b 1 may be provided thereon in case two or more alignment marks 108 b 1 are provided and two or more optical fibers are provided correspondingly the sum of the intensity of the beam passing through each of the alignment marks 108 b 1 will be increased compared with the case of one alignment mark further the control unit 112 controls the x drive unit 1081 to move the mask support 1084 in the x direction within the x directional beam scan region in response to an operational signal of a user an automatic alignment operation signal for the disk and the mask and stop the mask support 1084 at a position where the greatest intensity of the beam is observed for example as shown in fig4 a considering the x directional beam scan region as x 0 x 1 the mask.