the first referencing system can be formed by mechanical references at the plane plate 8 a or 8 b or the mount thereof and at the clamp 15 in certain embodiments the second referencing system can perform an image aberration measurement of the overall optical system furthermore optically electrically or magnetically sensible reference marks at the plane plates 8 a and 8 b themselves are conceivable for the second referencing system in this case the referencing systems described can be utilized by the control in such a way that the plane plates 8 a and 8 b can be moved relative to one another in a targeted manner it becomes clear from figure part 5 b which illustrates a plan view of the arrangement shown in fig5 a that the arrangement has for both plane plates 8 a and 8 b in each case three actuators 13 b arranged in each case at an angular distance of approximately 120 u00b0 in this case the actuators 13 b of the first plane plate 8 a are arranged such that they are rotated relative to the actuators 13 b of the second plane plate not visible in a manner such that the dimensions of the actuators 13 b that are projected in the direction of the optical axis of the optical system do not overlap in this way it is ensured that.