in this instance a diaphragm microvalve taken along section lines 48 48 of fig4 a the microvalve including diaphragm 48010 and valve seat 48020 as shown in the open position fig4 is a cross section of the diaphragm microvalve 48000 again taken along section lines 48 48 of fig4 a the microvalve in the closed position the flow rate through diaphragm microvalve 48000 can be controlled via the geometric design of the valve seat which is often referred to as gap resistance the physical characteristics of the valve seat in combination with the diaphragm can affect flow characteristics such as fluid pressure drop inlet and outlet pressure flow rate and or valve leakage for example the length width and or height of the valve seat can be proportional to the pressure drop across the microvalve 39 s diaphragm additionally physical characteristics of the diaphragm can influence performance parameters such as fluid flow rate which can increase significantly with a decrease in the young 39 s modulus of the diaphragm material valve leakage also can become optimized with a decrease in the young 39 s modulus of the diaphragm which can enable higher deflection forces further optimizing the valve 39 s overall performance and or lifetime typical microvalve features and specifications can include a valve seat the valve seat which is sometimes referred to as the valve chamber can be defined by its size and the material from which it is made using an exemplary embodiment.