material 7 for example with epoxy resin see fig7 the force sensor 100 110 can be used in combination with other treatment techniques such as rf and high intensity focused ultrasound hifu tissue ablation because there are no metallic parts required for reading out the signals and because there is no electrical signal required for the operation of the force sensor 100 110 the force sensor 100 110 can also be embedded in multifiber catheters for example in basket type catheters furthermore the force sensor 100 110 can be used in applications in which a control of the force f when penetrating tissue on purpose for example atrial septum is required it is also advantageous to apply the force sensor 100 110 for navigation with the catheter 120 130 towards a target location e g heart without damaging the walls of the arteries the force sensor 100 110 will provide a real time feedback of the contact force f with which the catheter 120 130 touches the artery walls furthermore it should be noted that the positioning and contact force sensing system is mr safe and compatible the force sensor 100 can be fabricated by a combination of dicing photolithography and deep reactive etching processes an alternative is focused ion beam milling fig8 a g illustrate an embodiment of a.