for example a compound represented by the general formula 3 str4 wherein a is an integer generally of 0 to 5 and preferably 0 to 2 r 3 which are the same or different each denote an alkyl group generally having 1 to 10 carbon atoms and preferably 1 to 8 carbon atoms an alkenyl group generally having 2 8 carbon atoms and preferably 2 6 carbon atoms such as a vinyl group and an ally group or an aryl group generally having 6 10 carbon atoms and preferably 6 8 carbon atoms such as a phenyl group and a tolyl group r 4 denotes a hydrogen atom an alkyl group generally having 1 to 10 carbon atoms and preferably 1 to 8 carbon atoms or a group denoted by the formula si r 3 3 in which r 3 has the same meaning as defined above r 5 denotes a halogen atom a nitro group or a group denoted by the formula si r 3 3 in which r 3 has the same meaning as defined above and if a is 2 or more r 5 are the same or different the group represented by r 3 is preferably a methyl group because in that case the volatility of the silyl fluoride that is by produced in the reaction in the present process i e a compound denoted by the following formula wherein r 3 has the same meaning as defined above becomes high examples of the n silylaniline compound denoted by the general formula 3 are.