be coated with or made of high friction material below a description will be given of the film feeding unit of the vacuum deposition apparatus according to an embodiment of the present invention with reference to fig1 as shown in fig1 the film feeding unit of the vacuum deposition apparatus of this embodiment includes an unwinding roller 51 a winding roller 61 and a cooling drum 20 the unwinding roller 51 acts to unwind the film web f from a film roll and the winding roller 61 acts to wind again the film web f which was unrolled by the unwinding roller 51 a guide roller 67 is provided by the side of the winding roller 61 particularly upstream of the winding roller 61 so as to guide the feeding of the film web f alternatively the guide roller can be provided adjacent to the unwinding roller 61 to guide the feeding of the film web f the film web f unwound from the unwinding roller 51 is fed to the winding roller 61 guided by the cooling drum 20 the cooling drum 20 is rotated by friction against the film web f so as to bring the mask m into close contact with the film web f on one side e g an outer circumferential portion thereof the thin film source including metal particles supplied from the thin film source unit 12 is deposited on overlapping.