105 a that are wound therearound the stationary coil 105 b the movable coil 105 a and electric current source 108 are connected in series so that the operation of the actuator is controlled by the electric current source 108 now the method used for preparing the actuator of this example will be described below in this example the stationary member 102 the movable member 103 the movable core 104 a the stationary core 104 b the movable coil 105 a the stationary coil 105 b the support member 106 and the parallel hinged springs 107 are prepared by means of the micro machining technology coil lower surface wiring 114 coil lateral surface wiring 115 and coil upper surface wiring 116 are prepared in the above mentioned order for both the movable coil 105 a and the stationary coil 105 b see fig5 l now the method used for preparing the actuator of this example will be described in greater detail by referring to fig5 a through 5l in each of fig5 a through 5l the left side and the right side show cross sectional views taken along line a a u2032 and b b u2032 in fig2 respectively firstly as shown in fig5 a a copper film was formed as coil lower surface wiring 114 on a substrate 101 by evaporation and subjected to a patterning operation subsequently as shown in fig5 b polyimide was applied to the substrate 101 to form an insulating layer 117 between the coil.