input valve 12 controlled by manually operable valve control means 14 input valve 12 is provided with a valve heating means 13 similar to heating device 16 in order to prevent the sulfur vapor being deposited in the input valve 12 or in the feed conduit 4 the vaporized sulfur then passes along the feed conduit 4 which is surrounded by an insulating wall 11 again to prevent cooling and deposition of the sulfur to the exit opening 3 into the implantation chamber 2 optionally means may be provided for supplying an inert carrier gas such as argon to facilitate the transfer of the sulfur vapor along the feed conduit 4 the carrier gas can be fed in from side wall of the evaporation chamber 17 or other places around the chamber not shown here it should also be noted that the evaporation chamber 17 and heating device 16 input valve 12 and input valve heating means 13 together with the first part of the feed conduit 4 surrounded by a thermally insulating wall 11 form an integral unit for vaporizing solid state materials and other materials and for supplying the resulting vapor into the pbii apparatus this integral vaporizing and supply means is connected to the remainder of the pbii apparatus by means of a quick release flange 10 by means of the quick release flange 10 the integral.