table relating scan mirror input parameter to scan frequency the sequence of events that happen after the instruction to execute the run the control program is entered is listed below 1 the lens and reflector stages are positioned to the locations specified in the data table both motors appear to run at the same time 2 the main translation stage 126 is positioned to the zero reference point i e driven to the extreme left position in fig1 a 3 the scan mirror 108 is started the shutter is not opened 4 the main translation stage 126 is moved to specified start position 5 the shutter 182 is opened and the laser beam is allowed to strike the surface 122 of wafer sample 116 6 the main translation stage 126 is held stationary for the specified wait period 7 the main translation stage 126 starts to move and drives to the final position specified in row b of fig6 9 the translational stage 126 is driven back to the zero reference position if it is the last run or to the melt zone start location if additional cycles are specified 10 the cycle is repeated the specified number of times specified in row.