to a low pass filtering process alternatively the preprocessing device 11 q can calculate a median or an average for each kind of detected information if a plurality of detecting elements are provided for detecting the kind of information in addition the preprocessing device 11 q can also conduct a highly advanced information process such as a data compression process the vacuum processing mechanism 31 in the embodiment has a processing container 4 which contains a stage 10 and in which a vacuum can be created a temperature adjusting means 10 t provided inside the stage 10 a lower electrode system 19 an upper electrode system 23 a vacuum creating system 57 that creates the vacuum in the processing container 4 and a gas supply system 35 that supplies respective gases into the processing container 4 the controller 51 is adapted to control the vacuum processing mechanism 31 based on the information from the sensor substrate 11 a flow of the information signal is shown in fig3 the vacuum processing unit 1 of the embodiment shown in fig1 is explained in more detail the processing container 4 is formed into a substantially cylindrical shape by for example aluminum whose surface has been subjected to an anodic oxidation process and forms a processing chamber 2 that can be hermetically closed the processing container 4 itself is connected to ground via a ground wire.