impact plate 160 preferably divides the deposition chamber 110 into two compartments 165 and 170 which can communicate with one another only at their tops as a result of this it is not until having flowed through the compartment 165 that the gases to be deposited enter the second compartment 170 and can there leave the deposition chamber 110 through the outlet opening 175 the incoming substances are preferentially deposited on the impact plate 160 so that the impact plate 160 assumes the function of the inner wall at the same time another way of feeding the line 135 into the deposition chamber 110 is represented in fig3 in this fig the connector 130 does not have any direct contact with the line 135 instead the heater 155 is arranged between the two this heater at the same time represents the thermal insulation 140 between the line 135 and the connector 130 in the embodiment represented here the temperature gradient is only formed inside the connector 130 and in parts of the casing 105 the line 135 protrudes with its delivery end 150 to a certain extent beyond the inner casing side 125 so that any process gases draining from it which have already condensed cannot be precipitated on the inner casing side 125 a heating strip wound around the.