the higher the pressure induced in the housing interior 14 by operation of the air vacuum controller 44 the smaller the expansion volume of the pump bag 46 and the smaller the quantity of slurry drawn into the bag interior 48 referring next to fig7 and 8 in typical application two slurry delivery systems indicated by reference numerals 10 a and lob respectively are connected to each other in parallel as illustrated in fig7 accordingly a pump controller 76 operates the air vacuum controller 44 the intake check valve 18 and the output check valve 42 fig2 and 3 components of each slurry delivery system 10 a and lob in conjunction with a shuttle valve 74 to alternately shuttle flow of slurry through the system 10 a and system lob designated u201c pump a u201d and u201c pump b u201d respectively in fig8 such alternating operation of the systems 10 a and 10 b provides a continuous flow or output of particle and air bubble free slurry 19 from a slurry supply reservoir 70 to a cmp apparatus 72 as indicated by the graph in fig8 0038 fig9 schematically illustrates a piping configuration for a selected number n of multiple slurry delivery systems connected to each other in parallel three of the slurry delivery systems 78 are designated by the reference numerals 78 a 78 b and 78 c respectively and the nth slurry delivery system 78 is designated by the reference numeral 78 n the slurry delivery systems.