those states for example at the boundary between state a and a u2032 is a 1 which indicates cancellation at the boundary between a and b there is a zero that indicates there is not cancellation and photoresist will be exposed similarly a boundary of state a and b u2032 shows a zero that indicates light is not cancelled and photoresist is exposed the effect of a boundary of states that show a 1 is that photoresist will not be exposed at that boundary and ultimately a line will be drawn this may a polysilicon line especially for minimum dimensions but this is not limited to polysilicon and could be any type of drawn line thus now referring back to fig1 line 22 shows a boundary of b and b u2032 that indicates cancellation and the formation of line 22 line 24 shows a boundary of states a and a u2032 and thus cancellation of light and the formation of line 24 line 26 has states b and b u2032 at its boundary and thus the cancellation of light and formation of line 26 in this example with only one type of light being available for region 30 due to the small dimension of region 30 it is necessary to have all four states an attempt to place different states in region 30 particularly at the intersection of line 24 lines 22 and 26 would result in a design rule violation with the attendant reliability risks shown in fig4 is a mask 42 that provides states a a u2032 b and b u2032 in.