surface on the front side of the crystal resonator plate 20 and configured to hermetically seal the crystal resonator piece 26 in a vibratable state and to form a lid body of the crystal resonator plate 20 and a base glass 32 bonded to a second surface on the back side of the crystal resonator plate 20 and configured to hermetically seal the crystal resonator piece 26 in a vibratable state and to form a lid body of the crystal resonator plate 20 in a center part of the crystal resonator plate 20 the crystal resonator piece 26 surrounded by an opening part and shaped like the tuning fork is formed and excitation electrode films 28 configured to vibrate the crystal resonator piece 26 are formed on surfaces of the crystal resonator piece 26 an upper bonding film 22 that is made of the same material as the material of the excitation electrode films 28 and that becomes an actual bonding part for the lid glass 30 is provided on a surface of a frame like part that surrounds the crystal resonator piece 26 though not illustrated the excitation electrode film 28 configured to vibrate the crystal resonator piece 26 is formed on the surface of the crystal resonator piece 26 on the back side of the crystal resonator plate 20 as on the front side lower bonding films 24 25 that are made of the same material.