the plasma process apparatus 10 under control of the controller 50 and a program i e a recipe for causing the various components or devices of the plasma process apparatus 10 to perform in accordance with process conditions in addition these programs may be stored in a computer readable storage medium 52 a and downloaded to the memory device 52 the computer readable storage medium 52 a may be a hard disk apparatus including a portable hard disk device a semiconductor memory including a flash memory an optical disk including a cd rom a cd r rw and a dvd r rw a magnetic disk including a floppy disk a usb memory etc in addition the programs may be downloaded to the memory device 53 from another apparatus such as a server through a network a particular program stored in the memory device 52 is read by the process controller 50 and run in accordance with an instruction input through the user interface 51 so that a corresponding process is carried out in the plasma process apparatus 10 next an example of a process carried out in the rlsa microwave plasma process apparatus 10 is described first the substrate s is transferred into the chamber 11 and placed on the susceptor 12 while the chamber 11 is being evacuated by the evacuation mechanism 24 the process gasses such as the cf gas and o 2 gas are supplied into the chamber 11 from the gas supplying system 17 through the gas supplying line 19 and the gas inlet portion 13 so that an etching process or the like is carried out in the plasma process apparatus 10 since microwave plasma which is characterized by radical rich plasma low electron temperature and high density is produced only a significantly reduced.