illustrated in fig2 and 4 the carriage 33 comprises frame members 43 45 47 and 49 two rollers 51 and 53 are mounted for rotation between the frame members 43 and 45 a conveyor 55 is looped over the rollers 51 and 53 to form a wet wafer conveyor for conveying a wet wafer to the drying station 42 two rollers 57 and 59 are mounted for rotation between the frame members 43 and 49 and a conveyor 61 is looped over these two rollers to provide a dry wafer conveyor for conveying a dry wafer from the drying station 42 as illustrated in fig1 the dry conveyor 61 is located at a level which is higher than the level of the wet conveyor 55 this prevents any contact of the dry wafer after it has been dried as described in detail below with residual moisture at the wet wafer conveyor 55 the carriage 33 also includes wafer support rollers located between the wet conveyor 55 and the dry conveyor 61 there are four such wafer support rollers an upper pair of support rollers 63 and a lower pair of support rollers 65 the upper support rollers 63 are level with the top surface of the dry conveyor belt 61 and the lower support rollers 65 are level with the top surface of the wet conveyor belt 55 all four support rollers are mounted for rotation between the side frame members 43 and 47.