by reference the reticle fine stage 16 can be isolated from the reticle coarse stage 14 or linked to the reticle coarse stage 14 such as by flexures not shown or other suitable linkages that permit a limited range of motion of the reticle fine stage 16 relative to the reticle coarse stage 14 to achieve motion of the reticle fine stage 16 relative to the reticle coarse stage 14 actuators 34 are used that are especially capable of providing extremely fine motions the actuators can be part of the linkage it is desirable that the reticle fine stage 16 be movable in all six degrees of freedom x y z u03b8 x u03b8 y u03b8 y this range of motions usually requires at least one respective actuator per degree of freedom by way of example suitable actuators are piezoelectric actuators as discussed in u s pat nos 6 693 284 and 6 867 534 to tanaka both incorporated herein by reference these and other suitable actuators typically have extremely small ranges of motion especially compared to the actuators 32 usually desired for moving the reticle coarse stage 14 additionally the reticle table 18 and thus the reticle chuck 20 desirably is mounted to the reticle fine stage by an appropriate linkage such as an air spring linkage to provide vibration isolation if air springs are used for example typically at least three air springs are used for supporting the reticle table in a tripod fashion if the reticle table.