optics 6 at a distance of less than 50 mm from the intersection of the optical axis 26 of the refractive subunit 27 with the object plane 4 this intersection is located centrically in the object field characteristic parameters of the projection optics will be recapitulated hereinafter the wavelength of the illumination light 3 is 193 3 nm at a bandwidth of 0 3 pm the image side numerical aperture of the projection optics is 0 8 the image field size is 6 u00d7 26 mm 2 the projection optics is telecentric on the input and output sides the following first table sets out the radii r i e the reciprocal values of the peak curvatures c and the distances between the optical components of the projection optics 6 in the z direction thickness mirror 1 to mirror 6 denote in this case the mirrors m 1 to m 6 of the projection optics 6 lens 1 a and lens 1 b denote the object side and the image side surface of the lens 28 accordingly the lines from lens 2 a denote the subsequent lens surfaces up to the image side surface of the lens 33 the subsequent second two line table sets out the index of refraction of the material siluv selected for the lenses 28 to 33 within the bandwidth of the illumination light.