of the orifice 2 outlet flow slots 7 formed along two sides 32 and 33 of the closure plate 4 leave the closure plate attached to the rest of the structure on two sides generally indicated at 34 and 35 as a general rule the area of the closure plate 4 is designed to be 10 100 times the area of the orifice embedded in the base plate 3 is electrode 8 and embedded in the closure plate 4 is an electrode 9 the lower electrode 8 is completely encapsulated by dielectric to electrically isolate it from the silicon substrate 1 and the upper electrode 9 the upper electrode 9 is completely encapsulated by the dielectric layers that form the closure plate to electrically isolate it from the lower electrode electrical connections 10 and 11 are made to the lower and upper electrodes by metal pads built up through vias to form a lower connection pad 10 and an upper connection pad 11 fig1 b is shown in the unenergized normally open position fig2 a shows the same embodiment of the valve as is shown in fig1 b but fig2 a shows the valve in the closed position when the valve as shown in fig1 b is to.