metal lines forming the fuse lines 21 from multiple metal lines the width of the metal patterns 24 along the second direction as represented with reference denotation w 3 are in some embodiments larger than w 2 of the nitride based patterns 23 for instance w 3 of the metal patterns 24 may be substantially the same as w 1 of the space parts s also the width of the metal patterns 24 along the first direction as represented with reference denotation l 3 may be larger than l 1 of the space parts s referring to fig5 a to 5c a wet dip process is performed to remove exposed portions of the oxide based pattern 22 using a mask which is the same as a mask for forming a subsequent fuse box as a result structures including the fuse lines 21 spaced at the center the nitride based patterns 23 formed in the space parts s having the second direction width w 2 smaller than the second direction width w 1 of the space parts s and a thickness larger than the thickness t 1 of the fuse lines 21 and the metal patterns 24 formed over the nitride based patterns 23 having the second direction width w 3 larger than the second direction width w 2 of the nitride based patterns 23 are formed because the second direction width w 3 of the metal patterns 24 is larger than the second direction width w 2 of the nitride based patterns 23 empty spaces s u2032 shown in fig5 c are formed below the metal patterns.