the invention it is no longer important in either the embodiment shown in fig1 or fig2 for securely holding a disk shaped article in place on carrier 100 that by means of the special design of annular nozzle 8 as the gas flows out of annular nozzle 8 between end surfaces 9 and 10 of carrier 100 facing the article and the article a negative pressure is formed which holds the disk shaped article against annular projection 108 120 this negative pressure which may form according to the bernoulli principle however can advantageously support holding the article securely in place in the invention the compressed gas flowing out of annular nozzle 8 provides primarily for the fact that treatment liquid cannot reach the bottom of the disk shaped article and can cause corrosion on carrier 100 in addition the compressed gas flowing out of annular nozzle 8 advantageously supports spinning off of the treatment medium by blowing off the drops of the treatment medium which are spun off of the periphery of the disk shaped article in addition the advantage arises that and this is especially important in the etching of silicon wafers with acid treatment media in the case of fracture of a disk shaped article the treatment medium which reaches part 103 of carrier 100 within ring 108 or an annular projection 120 is sucked out through opening 107 so that further damage is avoided in the embodiment of a carrier 100.