outer diameter the cross sectional dimension of the bubbler is critical to the performance of the cylinder otherwise the dimensions of the bubbler are not critical and are dependent upon the carrier gas flow the precursor compound to be used the particular chemical vapor deposition system used and the like the cross sectional dimension determines at a given pressure and flow rate the linear velocity of the gas in the cylinder which in turn controls the contact time between the precursor material and carrier gas and thus saturation of the carrier gas typically the bubbler has a cross sectional dimension of about 2 inches 5 cm to about 6 inches 15 cm the other dimensions for a particular bubbler are thus well within the ability of one skilled in the art a wide variety of organometallic compound precursors may be used with the bubblers of the present invention while solid or liquid organometallic precursors may be used with the present bubblers it is preferred that solid organometallic precursors are used suitable organometallic precursors include but are not limited to cyclopentadienyl magnesium trialkyl aluminum such as trimethyl aluminum and triethyl aluminum trialkyl gallium such as trimethyl gallium and triethyl gallium trialkyl antimony such as trimethyl antimony dimethyl hydrazine trialkyl indium such as trimethyl indium and the like it is preferred that the organometallic precursor is cyclopentadienyl magnesium and trialkyl indium and more preferably trimethyl indium such organometallic precursors are generally commercially available from a variety of suppliers any suitable carrier gas may be used with the present bubblers as long as it does not react with the organometallic precursor the particular choice of carrier gas depends upon a variety of factors such as the organometallic precursor the.