circuit for performing a triple charge pumping operation which pumps an internal voltage three times according to the target level of the internal voltage fig5 is a table for describing a capacitance gain of the voltage generator illustrated in fig1 referring to fig5 the table shows the number of capacitors coupled in series in a capacitive element according to a source voltage a capacitance gain based on a serial coupling and a total capacitance of the capacitive element when it is assumed that the maximum voltage that the oxide layer of a unit capacitor included in the capacitive element can withstand is 0 5v the cell type capacitor of the capacitive element may have a capacity 30 times greater than an mos type capacitor per unit area for example suppose that the capacity of an mos type capacitor utilizing the same area is 7 ff um 2 as the source voltage increases the number of capacitors selected in the capacitive element increases furthermore as the source voltage increases the total capacitance of the capacitive element decreases however the capacitive element may have a higher capacitance per unit area than that of the mos type capacitor thus in a conventional voltage generator using mos type capacitors the area of the capacitor region needs to be increased to have the same capacitance as cell type capacitors however the voltage generator in accordance with the embodiment of the present invention may a secure high capacitance even though the area is not increased thus the voltage generator may improve the pumping driving ability of the pumping circuit fig6 is a.