may be continuously implemented a typical range of z motion may be about u00b1 0 5 u03bcm this motion may be implemented using a piezoelectric driven mechanism in the controller and drive mechanism 190 the process described above may be implemented in hardware or software or a combination thereof for example the controller and drive mechanism 190 may include a processor that controls mechanical and or moving the different components fig4 illustrates the sinusoidal movement of the substrate translation stage 170 in the z direction with reference to lines a through e as they pass under the slit although the movement is shown to be sinusoidal different functions or waveforms having periodic form may characterize the movement of the substrate translation stage 170 for example a periodic triangular waveform having a periodic movement may be used to define the motion of the translation stage in addition the frequency of the substrate translation stage 170 oscillation may be increased the frequency of the translation stage 170 oscillation is defined in equation 3 below f n t 3 n is an integer and t is the period of time for a point in the image field to pass from one edge to another edge of the slit 160 or through the exposure field using the process described above the dof may be doubled the doubling of the dof by this method may also alleviate the stringent requirement of exact focus tracking during the scan which may increase the throughput of the scanner system although movement in the z direction.