for calculating a coefficient of thermal expansion of the adhesive tape 121 of fig3 referring to fig5 a thickness a coefficient of thermal expansion and a modulus of the adhesive agent 311 formed on the top surface of the base film 321 are respectively referred to as t 1 a 1 and e 1 a thickness a coefficient of thermal expansion and a modulus of the base film 321 are respectively referred to as t 2 a 2 and e 2 and a thickness a coefficient of thermal expansion and a modulus of the adhesive agent 331 formed on the bottom surface of the base film 321 are respectively referred to as t 3 a 3 and e 3 here an equivalent coefficient of thermal expansion ctet and an equivalent modulus mt of the adhesive tape 121 are respectively calculated as equations 1 and 2 below fig6 is a graph showing a thermal expansion coefficient of the adhesive tape 121 of fig3 according to a thermal expansion coefficient modulus and thickness of the base film 321 illustrated in fig2 in curve 640 the moduli of the base film 321 of fig5 and the adhesive tapes 311 and 331 are 4 gpa and a coefficient of thermal expansion of the base film 321 is in a range of 1 to 16 ppm since the modulus of the base film 321 is small and the moduli of the adhesive.