and the measuring table 21 arranged in the measuring chamber 20 so that the substrate b is passed through the intermediate chamber 60 and transported between the stage 11 and the measuring table 21 the belt conveyor 62 is divided into three conveyors of a conveyor 62 a on a side of the film forming chamber a conveyor 62 b on a side of the intermediate chamber and a conveyor 62 c on a side of the measuring chamber with the two partition valves 61 a and 61 b as boundaries when the partition valves 61 a and 61 b are closed the valve plates not shown of the partition valves 61 a and 61 b enter into the gap between the conveyor 62 a on the side of the film forming chamber and the conveyor 628 on the side of the intermediate chamber and the gap between the conveyor 62 b on the side of the intermediate chamber and the conveyor 62 c on the side of the measuring chamber accordingly as in the case of the first embodiment when the partition valves 61 a and 61 b are closed the partition valves 61 a and 61 b do not interfere with belt conveyor 62 thereby ensuring the blocking the chambers furthermore a delivery mechanism 34 having the same construction as the first embodiment is provided between the conveyor 62 a on the side of the film forming chamber and the conveyor 62 b on the side of the intermediate chamber and between the conveyor 62 b on the side of the intermediate chamber and the conveyor.