written for each sem discriminating a spectrum where wave numbers falling outside the tolerable range appear from spectra where wave numbers are within the tolerable range and displaying the spectrum and discriminating the graph itself of the corresponding sem from the graph of the sem having only a spectrum falling within the tolerable range and displaying it alternatively plural sems may be displayed as models as shown in fig1 and a specific sem model may be flickered when powers go outside the preset tolerable range or set values by providing display in this way diurnal change of each inspection apparatus and the differences between apparatuses can also be managed when an abnormality is discerned a disturbance factor is identified based on the analyzed disturbance frequency and work for eliminating the factor is performed in the above embodiment the master computer 105 picks up evaluated values of a disturbance vibrations from each apparatus the master computer 105 may pick up images for analyzing disturbance vibrations from each apparatus and analyses of the disturbance vibrations may be performed on the side of the master computer 105 on the side of each apparatus the work time for the analysis of disturbance vibrations can be passed to other work time in busy cases this is effective in that the inspection throughput is not deteriorated embodiments of scanning electron microscopes sems have been described so far similar advantageous effects can be obtained with a scanning transmission electron microscope stem and a scanning ion microscope sim that is any apparatus can yield the advantageous effects of the present invention as long as it is a microscope using a scanning beam made of focused charged particles furthermore a 1d fft or.