this embodiment the ots structure 310 is a hollow pillar in other embodiments the ots structure 310 may be different shapes fig4 a illustrates a cross section side view of a mems microphone 400 according to a second embodiment of the invention the mems microphone 400 includes a mems chip 402 a substrate 405 having a first side 407 and an ots carrier chip 410 the mems chip 402 includes a back plate 415 having a first side 417 and a second side 418 a membrane 420 having a first side 422 and a second side 423 and a support structure 425 having a first side 427 and a second side 428 the substrate 405 includes a substrate opening 430 the ots carrier chip 410 includes a base structure 435 having a first side 437 and a second side 438 and an ots structure 440 having a first side 442 and a second side 443 the first side of the membrane 422 is coupled to the second side of the back plate 418 the first side of the support structure 427 is also coupled to the second side of the back plate 418 the first side of the base structure 437 is coupled to the second side of the support structure 428 and is positioned so that the ots structure 440 is located inside the hollow area of the support.