array of mirror pads 41 is a physical layer 42 which may be called the u201c mems actuators and embedded rotation sensors u201d layer this layer 42 includes the actuators and sensors block 59 within the interface 46 mirror motion is also fed back 47 u2032 to the pid controllers this return serves particularly to implement the integral and differential aspects of the control u2014 as is generally understood in the related field of electronic control systems and accordingly is not further detailed here below the actuator sensor layer 42 is another physical layer 43 which includes in particular a cmos mixed signal pid controller 57 and high voltage circuits 58 remaining circuit blocks 44 51 56 may be distributed as between the lower two physical layers 42 43 or the main logic controller 44 may be elsewhere in the chip the controller 44 sends multiplexed commands for all the mirrors to the submirror layers 42 43 after demultiplexing 51 the system carries control data 52 for each mirror independently each mirror furthermore has been calibrated independently the calibration stored in and applied from a lookup table u201c lut u201d 53 considers not only mechanical variations within the mirror actuators and sensors 59 but also optical nonlinearities and variations elsewhere in the system particularly in.