is outputted to the image processing apparatus 34 the display device of the image processing apparatus 34 displays the piezoelectric element 11 and the electrode patterns 12 and 13 on the coordinate axes cpu of the image processing apparatus 34 calculates coordinates of the center of the center hole 11 m of the piezoelectric element 11 and the marking 14 of the piezoelectric element 11 on the coordinate axes further by comparing the coordinates of the center of the center hole 11 m and a set position of the piezoelectric element 11 a movement direction and a movement distance necessary for compensation are calculated further a rotational angle necessary for compensation is calculated by comparing a direction connecting the center of the center hole 11 m and the coordinates of the marking 14 with the set direction of the piezoelectric element 11 the above described movement direction the movement distance and the rotational angle necessary for compensation are outputted to the control circuit 35 the piezoelectric element 11 is sucked to chuck by the vacuum chuck 32 moved in a direction of movement necessary for compensation by an amount of a distance of movement necessary for compensation by the x y z axes robot 31 and is rotated by an amount of the rotational angle necessary for compensation by the vacuum chuck 32 in this way the piezoelectric element 11 is compensated to the set position and the set direction fig3 shows a plane structure of a piezoelectric actuator in steps of forming electrodes further the electrodes.