30 second slot 32 and exhaust slot 34 secondary manifold 72 includes third pumping fluid flowpath 114 fourth pumping fluid flowpath 116 third high pressure port 120 and fourth high pressure port 122 fluid valve 74 includes housing 124 piston 126 valve plate 26 and cup 128 first fluid displacement member 90 includes first set screw 130 first diaphragm 132 and first diaphragm plate 134 second fluid displacement member 92 includes second set screw 136 second diaphragm 138 and second diaphragm plate 140 central fluid displacement member 93 includes third set screw 142 central diaphragm 144 third diaphragm plate 146 and fourth diaphragm plate 148 inlet manifold 76 is attached to fluid cover 80 a and fluid cover 80 b inlet check valve 82 a is disposed between inlet manifold 76 and fluid cover 80 a and inlet check valve 82 b is disposed between inlet manifold 76 and fluid cover 80 b similarly outlet manifold 78 is attached to fluid cover 80 a and fluid cover 80 b outlet check valve 84 a is disposed between outlet manifold 78 and fluid cover 80 a and outlet check valve 84 b is disposed between outlet manifold 78 and fluid cover 80 b first fluid displacement member 90 is disposed between fluid cover 80 a and primary pump 86 first fluid displacement member 90 and fluid cover 80 a define fluid cavity 150 a first fluid displacement member 90 sealingly.