analysis space is expressed by using a poisson 39 s equation a green 39 s function and the green 39 s theorem the equation thus obtained is substituted into an unknown parameter in the equation to be expanded into infinite series stopping the expansion when the equation is expanded to some degree the equation can be expressed only with known parameters such as boundary conditions through calculating the respective values of integrations included in terms of the series by the monte carlo method and adding them up a physical quantity at a given position can be thereby obtained further by the same method a parasitic element constant at a given position in the analysis space can be also obtained with this method a simulation is achieved for obtaining a physical quantity and a parasitic element constant at a given position in an analysis space without solving a matrix equation application_number US 30527799 A description fig1 illustrates a model of an analysis space v having a boundary s u221e of infinity in the analysis space v there exist regions v 1 v 2 v i v j v n n u2267 1 having boundaries s 1 s 2 s i s j s n respectively applying the model view to the electrical element such as a semiconductor device the regions v 1 to v n correspond to conductor regions and other portions in the analysis space v correspond to dielectric regions one of a potential and a normal differential of potential on the boundaries s 1 to s n is given as a boundary condition further the potential and the normal differential of potential on the.