trench 91 b referring to fig1 a 10c a first contact electrode and a second contact electrode are formed by filling the substrate contact trench 91 a and the line trench 91 b respectively with at least one conductive material for example a metallic liner material and a metallic fill material can be sequentially deposited into the substrate contact trench 91 a and the line trench 91 b the metallic liner material can include a metallic nitride material such as tin tan and or wn the metallic fill material can include cu w or an alloy thereof excess portions of the metallic liner material and the metallic fill material are removed from above the top substrate of the dielectric passivation layer 90 for example by chemical mechanical planarization cmp the first contact electrode can include a first metallic liner portion 92 a and a first metallic fill portion 94 a and the second contact electrode can include a second metallic liner portion 92 b and a second metallic fill portion 94 b the first metallic liner portion 92 a and the second metallic liner portion 92 b are remaining portions of the metallic liner material the first metallic fill portion 94 a and the second metallic fill portion 94 b are remaining portions of the metallic fill material the exemplary structure of fig1 a 10c is an energy storage device including at least one series connection of a battery cell structure and a self programming fuse and specifically an energy storage device including a plurality of series connections of a battery cell structure and a self programming fuse each self programming fuse includes a metal semiconductor alloy portion 82 which can be electromigrated or blown disconnected when sufficient amount of electrical current flows therethrough and raises the temperature of the.