to the electrical supply of the heat radiation system 4 furthermore channels are provided through which a coolant for example water flows in order to cool the heat radiation system and the adjacent parts of the device fig1 also shows 34 d 34 which is the diameter of the cylindrical heat radiation system 4 34 d 34 is the distance between the heat radiation system 4 and the base 34 b 34 of the deposition reactor 3a carrier body 34 c 34 is placed on base 34 b 34 from fig2 it can be seen that the heat radiation system essentially comprises a cooling body 11 and heating elements 12 additionally shown is also a protective quartz sheath 13 as shown in cross section the cooling body 11 is of star shaped structure and the heating elements 12 are disposed at uniform intervals in a ring around the cooling body they are disposed in recesses 14 whose shape results from the structuring of the cooling body for the purpose of active cooling the cooling body has channels 15 through which a coolant such as water flows and which are connected to suitable channels in the guide tube 7 fig1 shows diagrammatically the.