the specific constructional parameters and the momentary position of the z spindle 11 i e the length of the beam 1 are of course determinative here for the exact values since the required measurement accuracy is less than 1 u03bcm these vibrations must have died out at the moment when the measurement is taken by the precision coordinate measuring machine a passive vibration damping cannot effectively intervene because of the dependence of the vibration on the position of the z spindle 11 a vibration sensor 6 is therefore provided on the z spindle 11 near the probe at a distance of about 10 cm 30 cm a q flex qa700 acceleration sensor sundstrand is for example suitable for this the sensor 6 is connected via signal leads 71 72 to the control circuit 8 which converts input signals to control signals the latter consists of a preamplifier 81 a low pass filter 82 as an interference filter a delay device 83 for phase matching and an output amplifier 84 with amplitude limiting the low pass filter 82 filters out interference it can be appropriate to make the amplification or frequency response of the control circuit dependent on the beam length and thus on the position of the z spindle 11 for this purpose the control circuit 8 can receive control signals from a control circuit 15 via a.