which are configured of a silicon substrate it is possible to reduce the amount of silicon substrate that is used which in turn makes it possible to achieve a reduction in material costs an insulation film 55 configured of an oxidized film that is a material different from the elastic membrane 50 is formed upon the elastic membrane 50 which in turn is formed upon on the flow channel formation substrate 10 piezoelectric actuators pressure generation units 300 each configured of a first electrode 60 a piezoelectric layer 70 and a second electrode 80 are provided upon the insulation film 55 in this embodiment the first electrode 60 functions as a common electrode that is shared by a plurality of piezoelectric actuators 300 whereas the second electrode 80 functions as an individual electrode provided independently for each piezoelectric actuator 300 meanwhile one end of each of lead electrodes 90 is connected to corresponding second electrodes 80 the other ends of the lead electrodes 90 are connected to a wiring board 121 in which is provided a driving circuit 120 the protective substrate 30 which has approximately the same size as the flow channel formation substrate 10 is affixed to the surface of the flow channel formation substrate 10 that faces the piezoelectric actuators 300 the protective.