part by volume of 30 parts by weight of h 2 o 2 1 part by volume of h 2 o and then rinsed in deionized water the substrate is then dried by means of spinning the reactor is provided with a discharge pipe 9 and is connected to a gas dosing system comprising a number of pipes 11 13 15 17 19 and 21 mass flow controllers 23 25 27 29 31 and 33 needle valves 35 and 37 and stop valves 39 41 43 45 47 49 and 51 pipes 15 and 17 are intended for a hydrogen flow to the reactor the flow being controlled by the mass flow controllers 27 and 29 pipe 19 is intended for a flow of a ph 3 h 2 mixture to the reactor the flow being controlled by mass flow controller 31 pipes 11 and 21 together with the mass flow controllers 23 and 33 are intended for flushing the gas dosing system with hydrogen by closing the needle valves 35 and 37 and opening the valves 43 45 41 and 39 the h 2 flow through pipes 15 and 17 can be adjusted without entering into the reactor the gas dosing system further comprises vents 53 and 55 an evaporator vessel 57 containing methyl cyclopentadienyl indium i is arranged in series with pipe 13 hydrogen can be led through the.