the transfer member such an advantage will be expected in production of other devices other than the liquid crystal display a transferred layer such as a functional thin film can be formed on a heat resisting substrate with high reliability such as a quartz substrate followed by patterning with maintaining the above mentioned advantage a highly reliable thin film can therefore be formed on a transfer member regardless of the properties of the transfer member an exfoliating method in accordance with the second embodiment of the present invention will now be described in detail with reference to the attached drawings in the second embodiment the separation layer 2 of the first embodiment has a layered structure including a plurality of layers fig9 to 16 are cross sectional views illustrating steps in accordance with this embodiment in the exfoliating method in accordance with the present invention the steps will be described sequentially with reference to these drawings since many matters are common to the first embodiment the same parts are identified by the same numeral and a detailed description will be omitted appropriately accordingly matters which are different from the first embodiment will be described 1 as shown in fig9 a separation layer 2 composed of a composite including a plurality of sub layers is formed on one face the face 11 of the substrate 1 in this case each sub layer in the separation layer 2 is deposited step by step onto the substrate 1 by a method described below preferably the substrate 1 is composed of a transparent material transmitting the incident light 7 when the light is incident on the outer surface of the substrate 1 in this case the transmittance for the incident light 7 is similar to that in the first embodiment materials for the substrate.