or carbon aerogels zirconia stabilized zirconia and alumina power is provided to the electronic device 13 by a lightweight compact and heat resistant battery 20 lithium and lithium ion batteries meet these requirements providing high temperature storage capacity up to 500 hours at 150c without any significant voltage discharge in an embodiment of the present invention when the environmental substance to be measured is temperature the result must not be influenced by conduction along the leads and the sensors additionally the electronic device 13 and battery 20 must reside sufficiently away from the sensors such that the electronics and battery do not act as a heat reservoir fig4 shows an example of how the sensors 10 electronic device 13 and battery 20 are positioned to provide maximum separation and the sensors 10 provide uniformity data across the diameter of the semiconductor substrate 16 an advantage of the present invention as stated in the earlier embodiment is the non intrusive handling and positioning of the semiconductor substrate measuring device by the same robotics or automated transport used to handle the standard semiconductor substrate material for manufacturing several physical requirements of the measurement device must be met to allow for the robotics to operate without fault in the handling these physical requirements are mass balance and dimension for most robotic systems the added mass of the battery 20 electronics 13 and sensors 10 should not exceed three times 3 u00d7 the weight of the semiconductor substrate by itself secondly position of.