to feed speed of a substrate 15 and an auxiliary belt roller 16 b which supports and rotates the auxiliary belt 16 a according to the structure as mentioned above an auxiliary belt 16 a rotates by rotation of the auxiliary belt roller 16 b a substrate 15 incomes and supplies to units 10 a 10 b by rotation of the auxiliary belt 16 a for this any one auxiliary belt roller 16 b among the auxiliary belt roller 16 b is connected to a motor capable of rotation according to an embodiment of the present invention the auxiliary belt 16 a is provided 5 auxiliary belt rollers 16 b comprising by a motor motion any one auxiliary belt roller 16 b rotates as auxiliary belt 16 a rotates simultaneously the other auxiliary belt roller 16 b rotates or the auxiliary belt 16 a is provided 2 or more auxiliary belt rollers 16 b comprising by a motor motion any one auxiliary belt roller 16 b rotates according to this auxiliary belt 16 a and the other auxiliary belt roller 16 b rotate meanwhile in an embodiment of the present invention the auxiliary carry device 16 comprises an auxiliary belt roller 16 b which is capable of driving by a motor and an auxiliary belt 16 a and as illustrated in fig8 the auxiliary belt roller 16 b can comprise a roller with low coefficient of friction and a roller rotates by less power income and provided by a substrate 15 in this case the auxiliary belt roller 16 b is preferably comprising a roller including bearing with low coefficient of friction and because of this a motor can be deleted in an embodiment.