reticle stage is connected to supports 127 via connections 128 that allow movement of the reticle stage 120 relative to the supports 127 the apparatus further comprises a positioning mechanism for positioning the reticle 101 relative to the reticle stage 120 the positioning mechanism comprise a reticle carrier 110 with an intermediate body 115 which in the shown embodiment is a spring mounted plate supports 116 each mounted on a spring 117 carry the intermediate body 115 the reticle 101 is connected with the intermediate body 115 in six degrees of freedom during the positioning of the reticle 101 relative to the reticle stage 120 the connection means 118 between the reticle 101 and the intermediate body 115 can be for example a mechanical or electrostatic clamp a magnet system or a system that uses a combination of gravity and friction of course the connection means 118 between the intermediate body 115 and the reticle 101 is switched off during the takeover of the reticle 101 by the reticle stage also the apparatus comprises a coupling mechanism 130 for coupling the intermediate body 115 with the reticle stage 120 due to the coupling of the reticle stage 120 and the intermediate body 115 the relative movement between the reticle 101 and the reticle stage 120 is significantly reduced or even turned to zero therefore the.