to a space within the vacuum chamber 11 the electron beam column 40 is attached on the ceiling surface of the vacuum chamber 11 also the electron beam emitting port 49 is formed opposite to a position near the principal surface of the substrate 15 on the turntable 16 the electron gun 41 emits an electron beam accelerated to for example several tens of kev by a cathode not shown which is applied with a high voltage supplied from an electron gun power supply 51 the converging lens 42 converges the emitted electron beam and leads the converged electron beam to the aperture plate 44 a blanking driving unit 54 operates based on a signal from a recording controller 52 to control the blanking electrodes 43 for controlling the electron beam between on and off operation specifically the blanking driving unit 54 applies a voltage across the blanking electrodes 43 to greatly deflect the electron beam passing therethrough in this way the electron beam is not converged on the iris hole of the aperture plate 44 i e blocked to pass through the aperture plate 44 so that the electron beam is controlled to be off a beam deflection driving unit 55 deflects the electron.