below 3 use of last best values as starting values for critical parameters 4 generate and verify a minimum and sufficient set of trusty recipes to cover most if not all beam setups as specified by the ion implantation system if a particular setup should fail the system will search for and setup a nearby trusty recipe as a refuge of stability and continue to proceed and setup for the required and target beam the set of trusty recipes is dictated by manufacturing requirements of the u201c tool u201d the ion implantation system that is determined by the customers some customers only use a particular tool for one or two species maybe in a limited range others may use it to do most of the implantation processes for these a larger set of trusty recipes is required to cover these cases unlike our competition a minimum set is suffice because our tool has a wide range of tolerance in terms of beam current and energy and using a close enough u201d trusty recipe u201d one can achieve the required beam setting 5 use of u201c touch tune u201d to assist initial or manual u201c teaching u201d setup to achieve the required beam current quickly u201c touch tune u201d is the procedure that can start at a given state and continue the tuning procedure to achieve the required target beam touch tune is a small subset of beam tune beam tune is used to set up species that is different from the previous setup it could.