coupled to the measurement system 84 for making particle defect measurements the light receiver 99 is connected to the measurement system 84 by a fiber optic line 97 the processor 80 receives measured particle defect data from the measuring system 84 and determines the overall optimal application angle 52 based on trial and error methods statistical methods or the like the memory 74 which is operatively coupled to the processor 80 is also included in the system 70 u2032 and serves to store program code executed by the processor 80 for carrying out operating functions of the system 70 u2032 power supply 72 provides operating power to the system 70 u2032 any suitable power supply e g battery line power may be employed to carry out the present invention any suitable interferometry system and or spectrometry system may be employed to carry out the present invention and such systems are intended to fall within the scope of the hereto appended claims in one embodiment the measurement system 84 is a polychromatic interferometer system or a monochromatic interferometer system to measure the particle defects formed on the photoresist material layer 34 u2032 in another embodiment the measurement system 84 is a spectrometry system interferometry systems and spectrometry systems are well known in the art and therefore further discussion related thereto is omitted for sake of brevity it is also to be appreciated that any suitable laser scattering or laser doppler anemometry system may be.