three processing steps are performed in the order in which they are listed sccm stands for standard cubic centimeter per minute a measure of gas flow fig3 shows the inner surface 2 of the contact hole 24 if the gas distribution plates gdp polymer cleaning is performed before the cleaning of the polymer from the contact holes the protective effect of the polymer layer within the inner surface of the contact holes is obvious the f ions formed during the first cleaning process of removing the polymer form the gdp have not been able to attack the inner walls of the contact holes this leaves a smooth surface of the contact hole after the polymer is removed from the inner surface of the hole no bamboo structure is visible fig4 shows a flowchart of the steps performed during polymer stripping that is a method for removing or etching polymer depositions in a plasma process chamber wherein substrates are processed step 1 is the positioning of the wafer in a plasma reactor that includes a chamber within which there can be created a radio frequency discharge and wherein pressure can be adjusted step 2 shows the flowing through the chamber of a gaseous medium that when subjected to the radio frequency discharge generates a plasma that includes reactive ions step 3 shows the adjusting of the first pressure level within the chamber step 4 is the adjusting of the power applied to the top plate in the chamber step 5 is the adjusting of the power applied to the bottom plate in the chamber step 6 is the.