the extended position fig1 illustrates an embodiment of the secondary enclosure with the labyrinth seal in the example of fig1 the enclosure part of the mini environment covers the space between the source 120 and enclosing the disk 125 in this example only one side of the disk is processed but it can be appreciated that by duplicating the elements of fig1 one can provide a system for processing both sides of the disk in this example the wall section is also fabricated of several part exterior wall 117 b is fitted over interior wall 117 a only the extension 118 of which is visible holes 111 b are aligned with holes 111 a which are not visible section 117 c is a fixed part of the labyrinth seal and has an extension 119 u2032 which fits into indentation 119 u2033 which is provided on the movable part 145 of the seal fig1 illustrates the construction of the enclosure wall of two parts with mating holes according to an embodiment of the invention interior wall 17 is shown with large diameter holes 111 a and extension 118 exterior wall is in the form of a ring 117 b and is shown with smaller diameter holes 117 according to embodiments of the invention additional pumping devices such as cryo panels and or meissner coils which preferentially capture water vapors can be installed near the exhaust channels of the secondary enclosure to further reduce the probability of the contaminants reaching the substrate it should be understood that processes and techniques described herein are not inherently related to any particular apparatus and may be implemented.