cr were used as targets thickness of the super thin films of tin aln tialn tic zrn vn hfn and crn was controlled by deposition time duration table 3__________________________________________________________________________structure of coated hard layers u03bcm intermediate laminated film 1 of super thin films a b sample layer 3 a b cycle sup 1 total sup 2 crystal sup 3 x ray sup 4 surface flank wearno u03bcm thicknees nm nm u03bcm structure pattern layer 4 mm mark__________________________________________________________________________3 1 none tin aln 0 15 3 4 different cubic none 0 310 bad3 2 none tin aln 0 6 3 5 different cubic none 0 141 good3 3 none tin aln 2 5 3 8 different cubic none 0 117 very good3 4 none tin aln 5 3 5 different cubic none 0 108 very good3 5 none tin aln 18 3 6 different cubic none 0 131 good3 6 none tin aln 30 3 4 different cubic none 0 107 good3 7 none tin aln 40 3 5 different cubic none 0 124 good3 8 none tin aln 80 3 6 different cubic none 0 322 bad hexagonal3 9 none tialn aln 0 15 3 5 different cubic none 0 288 bad3 10 none tialn aln 1 3 7 different cubic none 0 142 good3 11 none tialn aln 3 3 6 different cubic none 0 114 very good3 12 none tialn aln 8 3 2 different cubic none 0 097 very good3 13 none tialn aln 15 3 3 different cubic none 0 135 good3 14 none tialn aln 20 3 3.