application flow enters the microvalve from the inlet port and leaves through the outlet port this has the advantage of allowing simple packaging in a can 3000 such as a modified to 8 header 3006 with tubes 3008 attached to lid 3020 and 3010 as illustrated in fig3 in such an arrangement the microvalve 3002 and adhesive layer 3004 are compressed when pressurized reducing the need for strong bonding between the microvalve 3002 and its package consequently a more pliable but weaker adhesive can be used a bond wire 3012 is carried within lead 3014 sealed to the package by glass seal 3016 and is attached to bond pad 3018 fluid flows along flow path 3022 and into the inlet of microvalve 3002 the slider 3024 regulates flow through the microvalve by forming variable orifices 3026 and 3028 along the corners of slider 3024 nearest passage 3030 to outlet 3032 in micromachined seat valves the membrane must work against the force of a pressure difference acting over the orifice area this limits the maximum operating pressure however the static pressure on the slider can be balanced in the microvalve design in which a slider 4000 is incorporated into the microvalve as illustrated in fig4 balancing in this embodiment was accomplished by adding pressure balancing extension 4002 to the second end 42 of the displaceable member 26.