trace anions in buffered oxide etchants boe amp lcp by ic operable range preferred range specific range tp qas 610 hydroxide salt koh naoh koh koh concentration 0 1 m saturation 0 1 m 1 m 0 1 m amount u2014 0 1 ml 1 ml 0 5 ml hot block temp 100 200 u00b0 c 180 200 u00b0 c 200 u00b0 c sample volume dependant on detection limits the boe standard was prepared by semi c 2 2 95 guidelines recovery boe 10 1 ohs replicate chloride bromide nitrate phosphate sulfate 1 0 74 0 140 average 0 74 0 140 spike 1 50 ppb 42 126 42 196 recovery 84 104 84 112 spike 2 100 ppb 84 91 240 recovery 84 91 100 spike 3 100 ppb 95 90 255 recovery 95 90 115 spike 4 700 ppb 696 893 578 890 recovery 99 117 83 107 0049 test procedure tp qas 613 trace anions in hydrochloric acid hcl by ic operable range preferred range specific range tp qas 613 hydroxide salt koh naoh koh koh concentration 0 1 m saturation 0 1 m 1 m 0 1 m amount u2014 0 1 ml 1 ml 0 5 ml hot block temp 100 200 u00b0 c 140 160 u00b0 c 150 u00b0 c sample volume dependant on detection limits the hcl standard was prepared by semi c 1 7 95 guidelines recovery replicate chloride bromide nitrate phosphate sulfate hcl 37 1 0 8 2 0 6.