the jet nozzle faces a side of the stage 11 the jet nozzle 12 is movable relatively to the stage 11 by a traverse mechanism not shown and the jet nozzle 12 can scan a desired route above the substrate b mounted on the stage 11 whereby the jet nozzle 12 can jet aerosol z to a desired position on the substrate b the jet nozzle 12 is connected to an aerosol generator 13 the aerosol generator 13 is provided with an aerosol chamber 14 in which the material particles m can be accommodated and a vibrating device 15 that is secured to the aerosol chamber 14 and vibrates the aerosol chamber 14 a gas cylinder g for introducing carrier gas is connected to the aerosol chamber 14 via an introducing pipe 16 the tip of the introducing pipe 16 is located in the vicinity of the bottom surface in the aerosol chamber 14 and embedded in the material particles m as the carrier gas inert gas such as helium argon nitrogen or the like air oxygen or the like may be used the aerosol chamber 14 is connected to the jet nozzle 12 via an aerosol supplying pipe 17 and aerosol z generated in the aerosol chamber 14 is passed through the aerosol supplying pipe 17 and jetted from the jet nozzle 12 the jet nozzle 12 the aerosol generator 13 the gas cylinder g the traverse mechanism or the like as described above and a vacuum pump p for generating a difference in pressure between a film forming chamber 10 described later and the aerosol chamber 14 correspond to a jetting mechanism in the present invention the measuring.