mems mirror device in one embodiment of the invention this mirror device is similar to mirror device 100 fig1 a but for the following referring to fig5 layer 402 is similar to layer 102 except that mirror 104 is replaced with a mirror 404 like mirror 104 mirror 404 is connected by torsional hinge 106 to a first end of rotating frame 108 along rotational axis 110 however mirror 404 further defines an opening 406 to accommodate a bonding pad 410 bonding pad 410 is connected by a torsional hinge 412 to mirror 404 along rotational axis 110 referring to fig6 layer 502 is similar to layer 202 except that additional anchoring pads 510 a and 510 b are formed in lower layer 502 to support bonding pad 410 as described above mirror 404 is connected by torsional hinge 106 to rotating frame 108 and by torsional hinge 412 to bonding pad 410 the stiffnesses of hinges 106 and 412 are adjusted to control the rotational amplitude of mirror 404 for example to amplify the rotational amplitude of mirror 404 relative to the rotational amplitude of rotating frame 108 the stiffness of hinge 412 should be reduced and the stiffness of hinge 106 should be made relatively larger conversely to dampen the rotational amplitude of mirror 404 relative to the rotational amplitude of rotating frame 108 the stiffness of hinge 412 should be increased and.