apparatus to practice the method of the invention will now be described in connection with the reactivation of granular carbon granular carbon is used extensively in the semiconductor industry to adsorb organic solvents used to apply coatings onto surfaces of silicon wafers environmental regulations typically require that such organic solvents be removed from any air prior to its discharge into the atmosphere such carbon beds are normally either a carbon canister in the size of a fifty five gallon drum a larger carbon bed approximately 4 ft u00d7 4 ft u00d7 8 ft in dimension or a large bed e g 20 000 lbs is reactivated in place as installed in any case these beds have a limited adsorption capacity and must be replaced periodically with fresh carbon beds transport of the carbon beds off site for reactivation is expensive and may constitute an environmental hazard with the apparatus described above the method of the invention may be employed on site to reactivate such carbon beds this represents a significant cost reduction as well as alleviating the environmental hazard furthermore it has been found that use of the illustrated apparatus to practice the method of the invention results in a significant and unexpected increase in the number of.