calculated by multiplying the y axis first acceleration detection voltage m y2 re detected through the first detector 21 by the x axis driving voltage d x due to the deformations caused by the coriolis force and the vibrations of the x axis according to the x axis driving voltage d x of the inertial sensor 10 by the x axis driving voltage d x and the x axis angular velocity detection voltage w x corresponding to the x axis angular velocity calculated by multiplying the z axis first acceleration detection voltage m z2 re detected through the first detector 21 by the y axis driving voltage d y due to the deformations caused by the coriolis force and the vibrations of the y axis according to the y axis driving voltage d y of the inertial sensor 10 by the y axis driving voltage d thereafter the control unit 60 may further include determining whether the angular velocity detection voltage w x w y and w z of each axis of the inertial sensor 10 detected through the second detector 25 is detected for the predetermined time and again reconverting not shown the woken up second detector 25 the phase conversion unit 40 and the driving unit 50 to be in the sleep standby mode when there is no the angular velocity detection voltage w x w y and w z of each axis meanwhile at step s 31 when there is no output voltage s x1 s x2 s y1 and s y2 output from the detection electrodes for example the.