the sheet member and the working fluid beneath said sheet member is compressed and then sent to the upper side of the sheet member it is preferred that the compression means comprises a pressure chamber which is located at the inner part of said second compression means vibrating plate which comprises the outer wall of the pressure chamber and can be deformed to transform the volume of the pressure chamber inlet valve which can be opened and closed for the indraft of working fluid into the pressure chamber and outlet valve which can be opened and closed for the exhaustion of working fluid out of the pressure chamber it is preferred that the piezo actuators are formed through inserting insulator between a pair of piezo electric element and then joing the piezo electric element and insulator together the preferred embodiment is illustrated in the following detailed description referring to the accompanying drawings fig1 is a plane perspective view of the micro compressor according to the present invention as illustrated in fig1 the micro compressor 1 according to the present invention is equipped with compression means 10 which are disposed on the round sheet symmetrically in the first embodiment of present invention six compression means 10 are.