apparatus can set the probes for example the stored number of six in the case that the number of the probes which can be set is five taking into consideration a recovery of the replaced probe after electrolytic polishing the leading end portion of the probe the probe is put in the storage base 10 one by one the upper lid 12 is set and the storage base 10 is evacuated by the exhaust apparatus for example a dry pump until the inner portion comes to several pascal and is held by the holding block 17 at this time a holding method of the upper lid 12 may employ a screw next a dry etching is applied for removing an oxide film formed in the leading end portion in the manufacturing step the dry etching employs a milling apparatus which ionizes an argon in the vacuum and accelerates an argon ion so as to process fig4 shows a schematic view of the milling apparatus additionally provided with the storage container supply chamber at a time of manufacturing the probe storage container of the prober apparatus the oxide film at least in the leading end portion of the probe is removed by using the ion beam apparatus without being exposed to the atmospheric air the probe is stored in the probe storage container and the lid portion of the probe storage container is closed specifically it is executed for example as follows the storage container 11 in which the probe having the processed leading end is put is mounted on a storage base stage 19 a pin is additionally provided in the storage base stage 19 whereby positions of the storage base stage 19 and the storage container.