or liquid form or therebetween if in solid liquid form a vaporizer not shown may be disposed near the dopant source 418 and or the diluent source 420 and the vaporizer may convert the solid liquid dopant and or diluent into gas herein the term u201c gas u201d or u201c gaseous u201d may also include vapor from the dopant source 418 the dopant may be introduced preferably in gaseous state into the ion source chamber 202 meanwhile the diluent may be introduced preferably is gaseous stage into the ion source chamber 202 to dilute or mixed with the dopant in the ion source chamber 202 one or more controllers 422 a and 422 b may be provided to control the amount of dopant and or diluent introduced into the ion source chamber 202 in one embodiment as depicted in fig4 a the dopant and the diluent may be contained in separate sources 418 and 420 however the dopant and the diluent may be pre mixed in a first conduit 430 and provided into the ion source chamber 202 together in another embodiment as depicted in fig4 b the diluent may be provided into the dopant source 418 via a second conduit 482 or vice versa and provided into the ion source chamber 202 together in an embodiment that is not shown a single source containing a mixture of dopant and diluent may provide them into the ion source chamber yet in another embodiment as depicted in fig4 c the dopant and the diluent may also be provided into the ion source chamber 202 via separate conduits 480 and 484 in this embodiment the dopant and the diluent may be provided separately but mixed.