r and r 1 in formula a also being combinable into a cyclic group and r 2 representing a single bond n a ring or sih 2 application_number US 201414571943 A description it has been found that classes of liquid organo aminosilanes having an n u2014 sih 3 group as a key feature in the molecular structure are suitable as precursors for producing silicon carbo nitride films via cvd in the electronics industry these compounds lend themselves to the production of si x c y n z films under a variety of conditions the compounds herein are liquid at atmospheric pressure and room temperature i e 25 u00b0 c and thus provide a significant advantage over the reported usage of the trimethyl substituted aminosilane they are substituted with organo groups having at least 2 carbon atoms in the chain on the amino group providing for stability under conventional handling and processing conditions one class of amino silane is resented by formula a as follows in this class of compounds r is selected from c 1 c 10 alkyl groups linear branched or cyclic saturated or unsaturated aromatic heterocyclic r 1 is selected from c 2 c 10 alkyl groups linear branched or cyclic saturated or unsaturated aromatic heterocyclic hydrogen silyl groups with or without substituents and r and r 1 also being combinable into a cyclic group representative substituents are alkyl groups and particularly the c 2 4 alkyl groups such as ethyl propyl and butyl including their.