preferably divided into three sections as shown in fig2 the middle section 122 preferably comprises quartz because of its ability to withstand high temperatures two end sections 124 which are preferably made of glass are sealed to the quartz tube 122 the glass end sections 124 are also sealed to a metal foreline tube 126 which can be a standard iso nw50 flange the glass end sections 124 are provided because it is difficult to bond quartz directly to metal according to one embodiment the tube shown in fig2 is about 13 inches long from flange to flange with an inner diameter of about 2 inches and an outer flange diameter of about 3 inches the quartz section 122 may be about 10 inches long and the two glass sections 124 may each be 2 inches long these dimensions are of course provided only as an example and are not intended to be limiting as shown in fig3 a coil 130 is provided to generate a high density plasma source which efficiently abates pfcs and other products from the vacuum processing chamber 106 the coil 130 preferably encircles the inner quartz section 122 but not the glass end sections 124 so that the glass end sections 124 remain at a lower temperature fig3 shows the exemplary plasma reactor 100 a implemented as part of a vacuum processing apparatus the foreline 104 of the apparatus is at low pressure and contains reaction products from the vacuum.