coating the polymer elastic support 11 for example the pdms elastomer support is placed onto master mold 24 the soft and flexible properties of polymer elastic support 11 may make it possible to form a conformal contact with master mold 24 over a large area without external pressure as depicted in fig2 c then the photo curing process is carried out in a nitrogen atmosphere because oxygen molecules diffusing through the elastic support can inhibit the free radical polymerization of the photo curable materials preferably the polymer elastomers in the present embodiment are transparent to broadband of uv vis light the photo curable materials are exposed to uv radiation 26 with a dose around 30 mj cm 2 through the transparent polymer elastic support 11 the photo curable material is then solidified to form the rigid patterning feature layer 12 after curing the flexible imprint mold 25 is removed from the mold master 24 the solidified silicon containing photo curable materials have a low surface free energy so that the flexible mold 25 is easily released from the mold master 24 without any damage although the solidified silicon containing photo curable materials have a low surface free energy the flexible imprint mold 25 is preferably coated with a self assemble monolayer 13 of antiadhesion for better mold release after the imprint process the trichloro fluoroalkyl silane release agent is typically applied to silicon silicon dioxide or quartz molds via chemical reaction with silanol groups it forms a fluorinated self assembled monolayer 13 on the mold surface which is used to provide a low surface free energy coating for better mold release this release agent cannot be.