9 kpa the substrate temperature is increased to the growth temperature of the carbon nano tube of 840 u00b0 c next the first valve 47 is closed and the reaction tube 1 is evacuated then the opening degree of each of the first second fourth and fifth valves 47 51 57 59 is controlled so that the ethanol gas and the carrier gas are introduced in the reaction tube 31 with predetermined gas flow amounts respectively thus the inner pressure of the reaction tube 31 is maintained to 2 0 torr i e 266 pa specifically the gas flow amount of the ethanol gas is 20 sccm and the gas flow amount of the carrier gas is 20 sccm the partial pressure of the ethanol gas is maintained to 1 0 torr i e 133 pa the substrate temperature is maintained at 840 u00b0 c and the carbon nano tube is grown on the substrate for 10 minutes then the reaction tube 31 is evacuated again specifically the first to fourth valves 47 51 55 57 are closed and the fifth valve 59 is opened so that the tube 31 is evacuated next the third valve 55 and the fourth valve 57 are opened so that the argon gas including the oxide gas as the oxidized gas having a predetermined gas flow amount e g 300 sccm is flown in the tube 31 at a predetermined temperature e g 700 u00b0 c for a predetermined.