the buckling load of each of the ribbon like leads 2 and 3 the following equation may be employed as the standard while letting the junction strength of the junction portion 4 be 30n where the young 39 s modulus of the material of the ribbon leads 2 and 3 is e the geometrical moment of inertia of the ribbon like leads 2 and 3 is i and each length is 1 that is 2 and 3 is made to be smaller than the junction strength of the fired conductor junction portion 4 so as to cause the ribbon like leads 2 and 3 to be buckled and deformed prior to the breakage of the fired conductor junction portion 4 so that the fired conductor junction portion 4 can be protected and therefore the sensor chip 1 can be protected furthermore in order to prevent excessive dispersion of the detection characteristics of the thermal type flow rate sensor the dispersion in the angle of installation of the sensor chip 1 must be restricted within u00b1 2 for each product as one of the factors affecting the installation angle of the sensor chip 1 the nonuniformity of the thickness of fired conductor 41 of the junction portion 4 can be considered as shown in fig2 assuming that the dispersion of the thickness d of the fired conductor 41 of the junction portion 4 is 1 and as well as in order to meet the above mentioned conduction of u00b1 2 it is.