to acceptably detect a failure in any location of the diaphragm no matter what pattern is used a line shaped resistor may be disposed so as to substantially cover the entire diaphragm so that a change in the resistance value of the line shaped resistor may be generated when a failure such as fracture occurs in the diaphragm so far it has been described that the present invention is applied to a piezoresistance type pressure sensor but the present invention is not limited thereto it may be applicable to a capacitance type pressure sensor a semiconductor diaphragm based flow sensor an acceleration sensor a micro machining relay an actuator that controls inflow and outflow of a fluid and etc fig5 shows a case where the present invention is applied to a capacitance type pressure sensor 50 line shaped resistors r are disposed on a diaphragm 53 when external pressure is applied the diaphragm 53 deflects in the direction of arrow 55 and the capacitance of capacitors 53 54 changes thereby allowing for pressure detection fig6 shows a case where the present invention is applied to a micro machining relay line shaped resistors r are disposed on both diaphragms 63 by moving the mass 62 in the direction of arrow 67 by use of static electricity force etc electrodes 64 and 65 become electrically conductive or nonconductive fig7 shows a case where the present invention is applied to an actuator that controls inflow and outflow of a fluid line shaped resistors r are disposed on diaphragms 73 as the fluid 75 expands and contracts due to a heater 78 to.