fluorine containing organic acid and c at least one amino acid derivative the film formed through use of the material of the invention serves as both an anti reflective film and a protective film the material of the present invention provides a number of advantages in the formation of resist patterns including excellent film forming properties excellent dimensional accuracy and aligning accuracy simple and easy handling high productivity and good reproducibility application_number US 83305297 A description the present invention will next be described in more detail the anti reflective coating composition of the present invention contains a water soluble polymer the water soluble polymer which is used in the invention is a poly n vinylpyrrolidone homopolymer and or a poly n vinylpyrrolidone copolymer examples of the poly n vinylpyrrolidone copolymer include n vinylpyrrolidone vinyl acetate copolymers n vinylpyrrolidone vinyl alcohol copolymers n vinylpyrrolidone acrylic acid copolymers n vinylpyrrolidone methyl acrylate copolymers n vinylpyrrolidone methacrylic acid copolymers n vinylpyrrolidone methyl methacrylate copolymers n vinylpyrrolidone maleic acid copolymers n vinylpyrrolidone dimethyl maleate copolymers n vinylpyrrolidone maleic anhydride copolymers n vinylpyrrolidone itaconic acid copolymers n vinylpyrrolidone methyl itaconic copolymers and n vinylpyrrolidone itaconic anhydride copolymers particularly preferred water soluble polymers are poly n vinylpyrrolidone homopolymers and n vinylpyrrolidone vinyl acetate copolymers these water soluble polymers may be used singly or in combinations of two or more species the anti reflective coating composition of the present invention.