the waste gas by adding bleed air 230 at 50 to 250 cfm to the waste gas the result of this additional bleed air may increase the flow of exhaust air to about 300 to 500 cfm and may be to reduce the sulfuric acid to non detectable levels and the ozone from 179 to 107 ppmv the reduced volume of sulfuric acid reduces the acid to a level that is less harmful to the abatement tooling in addition by reducing the ppmv of the ozone the inventor has determined that the effectiveness of the abatement at later stages improves the exhaust air may then be fed to an ozone abatement chamber 250 which will utilize uv energy to abate the ozone to about 21 ppm the inventor has determined it may be useful to reduce the ozone further to a level below 10 ppmv to nitrous oxide prior to providing it to a regenerative thermal oxidizer or rto 270 therefore one embodiment of the invention may provide the exhaust air to a second chamber 260 the exhaust air may be abated such that the level of ozone is reduced to about 9 to 5 ppm at from 300 to 500 cfm the final step in the process to remove any remaining sulfuric acid and or ozone is to provide the.