glass surface is dipped into a dilute solution of octadecyltriethoxysilane or octadecyltrichlorosilane a well ordered monolayer film assembles on the glass surface subsequent baking of the film makes a permanent bond of the film to the surface because the end group on the long chain alkyl can have a large number of different functional groups sam 39 s allow tuning the surface energy of the glass mold to promote release of the microlenses to the wafer to which they are to be transferred the sam 39 s are robust and will survive multiple reuses and moreover when fouled they can easily be removed completely by oxygen ashing and a fresh sam applied fig2 provides a process flow chart description of one embodiment of the present invention in fig2 two parallel process sequences are shown one for the filling and inspection of the cavities in a prepared mold plate and a second for the preparation of the wafer to be receiving the transferred elements from the cavities of the mold plate the details of the apparatus design alignment transfer optional reflow and mold reuse cleaning processes are described in the set of fig2 through 7 in fig2 a wafer scale mold plate 220 with photolithographically formed and etched optical alignment keys 254 and etched cavity array with cavity sidewalls coated with a release layer such.