the mixed organic metal can be stably supplied by feeding back control signals to the raw material vaporizer 1 or the control unit 11 for controlling the carrier gas flow rates on the basis of the results measured with the ftir gas analyzer 20 and adjusting the heating or retaining temperature of the raw material vaporizer 2 4 or the flow rates based on the mass flow controllers 12 14 individually fig4 shows results measured with the ftir gas analyzer 20 in the case that the organic metal gases g 2 originating from zr t oc 4 h 9 4 and g 3 originating from ti i oc 3 h 7 4 were simultaneously introduced into the gas mixing chamber 15 while the temperature inside the gas mixing chamber 15 was kept to 70 u00b0 c in fig4 the upper and lower graphs show the spectrum of only the organic metal gas g 2 and that of only the organic metal gas c 3 respectively the middle graph shows the spectrum of the mixed g 2 and g 3 the middle spectrum is different from the spectrum obtained by introducing only the organic metal gas g 2 to the gas mixing chamber 15 and the spectrum obtained by introducing only the organic metal gas g 3 thereto that is in the middle spectrum peaks were lost or shifted from the upper and lower spectra and new peaks were generated this fact can be more clearly understood from fig5 which is an enlarged view of a part 1600 350 cm 1 of the wavenumber range shown in fig4.