2 is 180 u03bcm while the distance between the first opening 206 and the abutment position t 1 is 220 u03bcm next as for the third opening 208 as shown in fig8 separated portions g 5 which are opposed to one another with a gap therebetween are formed between the peripheral portion first peripheral portion 249 and the connecting portion second connecting portion 223 c which mutually overlap in fig5 the separated portions 5 are not shown however even if the separated portions g 5 are formed the peripheral portion 249 and the peripheral portion 223 c have mutually overlapping adhered portions c 5 moreover a maximum length l 2 of the adhered portions c 5 is set to be greater than a maximum length s 2 of the separated portions g 5 accordingly sufficient connection reliability is ensured between the peripheral portion 249 and the peripheral portion 223 consequently it is possible to ensure reliability of the electrical connection between the through hole conductor first through hole conductor 237 and the connecting portion 223 c as shown in fig8 the adhered portion c 5 is formed not only on the leading end side of the through hole first through hole 241 h 3 but also on the base end side thereof however in this embodiment the width of the adhered portion c 5 is set to be longer on the leading end side and very small on the base end side further the electrode pad 245 is provided on the base end side of the opening 208 as the abutment position t 3 between the connection terminal 139 and the electrode pad 245 is thus located.