through their through holes 3a2 3e2 and those 3a3 3e3 of the spacers 3a1 3e1 fixing pins 30 are then inserted into fixing holes 3a4 3e4 and 3a5 3e5 provided on both sides of the through holes 3a2 3e2 and 3a3 3e3 respectively of the substrate support arms 3a 3e and spacers 3a1 3e1 to position and fix the substrate support arms 3a 3e as shown in fig2 pulley support members 8a 8b pulleys 8c 8d and a driven belt 8 similar to those mentioned above are arranged on both ends but at the other side of the base 2 the driven belt 8 is reciprocated in the longitudinal direction r of the base 2 by a motor not shown arranged on the base 2 the lower end of an arm support member 7 for one wafer or substrate is attached to the driven belt 8 the upper portion 7a of the arm support member 7 for one wafer is located or housed just under the arm support member 4a to freely come into and out of there one end of a one substrate support arm 3f is attached to the upper end 7a of the arm support member 7 grooves similar to those on each of the substrate support arms 3a 3e are formed on the other end of the substrate support arm 3f the arm support member 7 its upper end 7a and the like form a single substrate support system the base 2 is connected to a drive system not shown and can be reciprocated up and down as shown by arrows z and in the horizontal direction as shown by arrows u03b8 the transfer device 10 having the above described arrangement is incorporated into a case 11 of.