in this embodiment a sensor body 22 which consists of an upper and a lower semiconductor substrates having therein a nozzle hole 3 a gas path 4 with a pair of heat wires 51 and 52 and incorporates a miniature pump 18 in the inner part thereof is placed on a base 24 in a gas filled case 23 and is put into working state by driving the pump to force the gas into the gas path 4 of the sensor body through the nozzle hole 3 creating gas circulation in the case 23 in fig8 power supply terminals and output terminals are designated with numerals 25 and 26 respectively since all parts of the gas flow type angular velocity sensor can be formed by utilizing the semiconductor technology and the ic technology it becomes possible to obtain a small and precise gas flow type angular velocity sensor adequate for mass production as apparent from the foregoing description in a gas flow type angular velocity sensor wherein an output signal corresponding to a difference in temperature sensitive outputs of paired heat wires is produced when a flow of gas injected into a gas path through a nozzle hole and directed toward the paired heat wires is deflected by the action of an angular velocity on the gas flow the present invention forms the.