Finite element analysis of fiber-optic Fabry-Perot pressure sensors based on silicon diaphragms.Fiber-optic Fabry-Perot pressure sensors based on silicon diaphragms of different thicknesses were fabricated using surface and bulk MEMS techniques in this study.  The multi-beam interference resulting from multiple reflecting mirrors with the elastic deformation of the Fabry-Perot sensor was simulated by finite element analysis. 
Finite element analysis
Finite element analysis of fiber-optic Fabry-Perot pressure sensors based on silicon diaphragms.Fiber-optic Fabry-Perot pressure sensors based on silicon diaphragms of different thicknesses were fabricated using surface and bulk MEMS techniques in this study. 
MEMS