Confocal fluorescence microscopy for geometry parameter measurements of submerged micro-structures.Due to the challenging environment of micro-manufacturing techniques where the workpiece is submerged in a fluid, a contactless in situ capable measurement is required for quality control.  Confocal fluorescence microscopy is shown to enable step height measurements of a specimen submerged in a 2.6 mm thick fluid layer with an uncertainty of 8.8 μm by fitting a model of the fluorescence intensity to the measured signal. 
Confocal fluorescence microscopy