Batch-producible MEMS fiber-optic Fabry-Perot pressure sensor for high-temperature application.A fiber-optic Fabry-Perot pressure sensor based on a micro-electro-mechanical system (MEMS) and CO2 laser fusion technology is developed and experimentally demonstrated for high-temperature application. 
CO2 laser fusion technology
The separated sensing head and the single-mode fiber are fused together to form the Fabry-Perot cavity using the CO2 laser. 
the CO2 laser