Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope.The fabrication of solid-state nanopores in an insulating membrane has attracted much attention for biomolecule analysis such as DNA sequencing and detection in recent years. 
helium ion microscope
Here we report new results in a set of experiments demonstrating that with a small range of stage automatized motions and equal mill times one can obtain good fabrication reproducibility in nanopore sizes (<10% variation in size). 
nanopore sizes
Here we report new results in a set of experiments demonstrating that with a small range of stage automatized motions and equal mill times one can obtain good fabrication reproducibility in nanopore sizes (<10% variation in size). 
stage automatized motions
It is easy to control the nanopore size and reach sub 10 nm pore size with a simple change in the milling time with an appropriate ion beam current.  The automation in the stage motion and milling time opens a door for the rapid mass production of nanopore chips over a wafer size of several inches.
milling time