b'Dr. SHEETAL J. PATIL\nPost Doctorate Fellow\nMicroelectronics branch\nDepartment of Electrical Engineering\nIndian Institute of Technology Bombay,\nPowai, Mumbai, India\nPhone:- +91-22-2576 4405\nE-mail:- sheetal@ee.iitb.ac.in\n\nAREAS OF INTEREST\n\xef\x82\xb7\n\xef\x82\xb7\n\xef\x82\xb7\n\xef\x82\xb7\n\xef\x82\xb7\n\nBio- MEMS and Nano technology\nDeep Sub-micron CMOS Technology\nHigh and Low-k Dielectrics and their Reliability\nNovel Semiconductor Device Structures\nFabrication and characterization of Sensor materials\n\nEDUCATION\n\nDoctor of Philosophy (Ph.D.) in Electronic Science\n(Department of Electronics Science)\nSpecialization\n: Thin films processing (Material Science)\nInstitute\n: University of Pune\nAwarded date\n: July 2004\n\nMaster of Science (M. Sc.) in Electronic Science\nMajor\nInstitute\nPost Graduation\n\n: Electronic Science\n: Department of Electronic Science,\nUniversity of Pune, India\n: June 1998\n\nBachelor of Science (B.Sc.) in Electronic Science\nMajor\nInstitute\nGraduation\n\n: Electronic Science\n: Modern College,\nUniversity of Pune, India\n: June 1996\n\nSheetal J. Patil Resume\n\n\x0cRESEARCH EXPERIENCE\nFrom\n\nTo\n\nApril 2004\n\nTill date\n\nAugust 2001\n\nMarch 2004\n\nDec. 1998\n\nJuly 2001\n\nJuly 2000\n\nOct. 2000\n\nJune 1998\n\nDec. 1998\n\nName and Address of\nCompany / Organization\nMicroelectronics group\nDept. of Electrical Engg.\nIIT Bombay, Powai,\nMumbai 400 076\nDept. of Electronic Science\nUniversity of Pune, Pune\n411 007\nDept. of Electronic Science\nUniversity of Pune, Pune\n411 007\nModern College, University\nof Pune\nDept. of Electronic Science\nUniversity of Pune, Pune\n411 007\n\nPosition held\nPost Doctorate Fellow\n(PDF)\n\nCSIR-India sponsored\nSenior Research Fellow\n(SRF)\nJunior Research Fellow\n(JRF) (BRNS sponsored\nproject)\nLecturer\nOHP Software Developer\n\nPROJECTS & SEMINARS UNDERTAKEN\nPh. D. Topic\n\xef\x82\xb7 Deposition and characterization of Nitride and/or Oxynitride films of Silicon and\nIndium in an In-House fabricated, \xe2\x80\x9cActivated Reactive Evaporation (ARE)\xe2\x80\x9d System.\nGuide: Prof. S. A. Gangal\nM. Sc. Project\n\xef\x82\xb7 Development of Voltage Clamp instruments for Cell Characterization\nGuide: Dr. A. D. Shaligram\nProject Like Experiment\n1. MOS Capacitor fabrication\n2. PC to PC communications\nB. Sc. project\n\xef\x82\xb7 Development of data acquisition system using 8085 microprocessor\nGuide: Dr. S. Deuskar\nPROFICIENCY IN\n1. Programming Languages\n\n: C, C++ and HTML 4.0\n\n2. Graphical Packages\n\n: Corel 9, Adobe Photoshop 5.0, Illustrator 7.0, Fractal\nDesigner, Origin 6.0\n\n3. Operating Systems\n\n: MS-DOS, Windows 9X, 2000 & WINDOWS-NT\n\n4. Web Packages\n\n: Front Page 2000, First Page 2000, Java Designer\nSheetal J. Patil Resume\n\n\x0cEXPERIENCE IN SEMICONDUCTOR PROCESSING\nWorking in Microelectronics lab (Class 1000) of Department of Electrical Engineering at\nI.I.T. Bombay, INDIA. I am having expertise on following systems: \xef\x82\xb7\n\nActivate Reactive Evaporation (ARE) system\n\n\xef\x82\xb7\n\nThree zone Oxidation/Diffusion Furnaces from M/sTempress, General signal\n\n\xef\x82\xb7\n\nElectron Beam Vacuum Coating Unit M/s Edwards Vacuum systems\n\n\xef\x82\xb7\n\nThermal Evaporation System M/s HindHivac Vacuum systems\n\n\xef\x82\xb7\n\nMask aligner M/s Indo French High tech Equipment\n\n\xef\x82\xb7\n\nDC and RF Plasma Sputtering System\n\n\xef\x82\xb7\n\nMillipore and Barnstead DI water plant set up\n\n\xef\x82\xb7\n\nRCA and Ultra sonic cleaning set up\n\n\xef\x82\xb7\n\nEllipsometer M/s Sentech Ellipsometer (SE800)\n\n\xef\x82\xb7\n\nThorough knowledge of operation and maintenance of clean workbenches (class 100)\nand clean rooms (class 1000)\n\n\xef\x82\xb7\n\nOptical Lithography\n\n\xef\x82\xb7\n\nMagnetron Sputtering System\n\n\xef\x82\xb7\n\nPlasma Polymerization System\n\n\xef\x82\xb7\n\nPlasma Ashing system\n\n\xef\x82\xb7\n\nScanning Electron Microscope\n\n\xef\x82\xb7\n\nX-ray Photoelectron Spectrometer\n\nCHARACTERIZATION TECHNIQUES KNOWN\n\xef\x82\xb7\n\nX-Ray Diffraction (XRD)\n\n\xef\x82\xb7\n\nX-ray Photoelectron Spectroscopy (XPS)\n\n\xef\x82\xb7\n\nEnergy Dispersive Analysis of X-ray (EDAX)\n\n\xef\x82\xb7\n\nFourier Transform Infra-Red Spectroscopy (FTIR)\n\n\xef\x82\xb7\n\nUV Spectroscopy\n\n\xef\x82\xb7\n\nEllipsometery\n\n\xef\x82\xb7\n\nContact Angle measurement\n\nSheetal J. Patil Resume\n\n\x0c\xef\x82\xb7\n\nScanning Electron Microscopy\n\n\xef\x82\xb7\n\nC-V and I-V measurements\n\n\xef\x82\xb7\n\nAtomic Force Microscopy\n\n\xef\x82\xb7\n\nAntibody Immobilization set up\n\nPUBLICATIONS\n\nInternational Journal\n1)\n\nSheetal J. Patil, Dhananjay S. Bodas, A. S. Ethiraj, R. C. Purandare, G. J. Phatak, S. K.\nKulkarni and S. A. Gangal. \xe2\x80\x9cVacuum 65/1 (2002) 91-100\xe2\x80\x9d.\n\n2)\n\nSheetal J. Patil, Dhananjay S. Bodas, G. J. Phatak and S. A. Gangal. \xe2\x80\x9cBull. Mater. Sci.\n25/5 (2002) 399-402\xe2\x80\x9d.\n\n3)\n\nSheetal J. Patil, Dhananjay S. Bodas, A. B. Mandale and S. A. Gangal, \xe2\x80\x9cThin Solid\nFilms 444 (1-2) (2003) 52-57\xe2\x80\x9d.\n\n4)\n\nSheetal J. Patil, Dhananjay S. Bodas, A. B. Mandale and S. A. Gangal Accepted for\nPublication to the Journal \xe2\x80\x9cAppl. Surf. Sci.\xe2\x80\x9d.\n\n5)\n\nDhananjay S. Bodas, Sheetal J. Patil, A. B. Mandale and S. A. Gangal, Accepted for\nPublication to the Journal of \xe2\x80\x9cAppl. Poly. Sci. 91 (2004) 1183-1192\xe2\x80\x9d.\n\n6)\n\nDhananjay S. Bodas, R. V. Dhabhade, Sheetal J. Patil, and S. A. Gangal, \xe2\x80\x9cProc. MHS2001 IEEE; 51-56\xe2\x80\x9d.\n\nNational Journal\n7)\n\nDhananjay S. Bodas, R. V. Dhabhade, Sheetal J. Patil, and S. A. Gangal, \xe2\x80\x9cJournal of\nIndian Institute of Science\xe2\x80\x9d 81/6 (2001) 645.\n\nConferences\n8)\n\nDhananjay S. Bodas, R. V. Dabhade, Sheetal J. Patil, and S. A. Gangal, \xe2\x80\x9cNational\nSeminar on Physics and Technology of Sensors (NSPTS-9)\xe2\x80\x9d at Dept. of ElectronicScience, University of Pune, India, March 2002, p-C-33-1\n\n9)\n\nSheetal J. Patil, Dhananjay S. Bodas and S. A. Gangal, \xe2\x80\x98IVSNS 2001\xe2\x80\x99 at IISc. Banglore\nIndia 2001.\n\n10) Dhananjay S. Bodas, R. V. Dhabhade, Sheetal J. Patil, and S. A. Gangal, \xe2\x80\x98IVSNS 2001\xe2\x80\x99\nat IISc. Banglore India 2001.\n\nSheetal J. Patil Resume\n\n\x0c11) Sheetal. J. Patil, G. J. Phatak and S. A. Gangal \xe2\x80\x9cNational Seminar on Physics and\nTechnology of Sensors (NSPTS-8)\xe2\x80\x9d at IGCAR, Kalpakam, India, Feb. 2001, p-49.\n12) Dhananjay S. Bodas, Sheetal J. Patil, and S. A. Gangal, \xe2\x80\x9cNational Seminar on Physics\nand Technology of Sensors (NSPTS-8)\xe2\x80\x9d at IGCAR, Kalpakam, India, Feb. 2001, p-48.\n13) S. J. Patil, G. J. Phatak, and S. A. Gangal, \xe2\x80\x9cNational Seminar on Physics and\nTechnology of Sensors (NSPTS-7)\xe2\x80\x9d at Dept. of Electronic-Science, Univ. of Pune, India,\nMarch 2000, p-C-59-1\n14) S. J. Patil, N. A. Kulkarni and S. A. Gangal, \xe2\x80\x9cNational Seminar on Physics and\nTechnology of Sensors (NSPTS-6)\xe2\x80\x9d at Thapar Institute, Patiala, India, Mar 1999 p-C-36\n\nCommunicated\n1) Sheetal J. Patil, K. C. Mohite, A. B. Mandale, M.G. Takawale and S. A. Gangal,\n\xe2\x80\x9cCharacterization of \xe2\x80\x98ARE\xe2\x80\x99 deposited silicon nitride films and their feasibility of\nantireflection coating\xe2\x80\x9d communicated to the journal \xe2\x80\x9cSurface Science and coating\ntechnology\xe2\x80\x9d.\n2) Dhananjay S. Bodas, Sheetal J. Patil, A. B. Mandle and S. A. Gangal, \xe2\x80\x9cPMMA as an\netch mask for silicon micromachining\xe2\x80\x9d, communicated to the journal, \xe2\x80\x9cSmart\nMaterials and Structures\xe2\x80\x9d.\n\nMANAGEMENT EXPERIENCE\n1. As a system In charge for various furnaces and equipments\n2. As a lab In charge of Microelectronics lab, Department of Electrical Engineering, IITBombay. (Nov 04 \xe2\x80\x93 till date)\nPROFESSIONAL OBJECTIVE\nSeeking excellence in the chosen professional field through self-motivation, hard work\nand augmentation of core skills required to effectively deliver goods. Striving to achieve\nexcellence through selective and focused pursuit of the short and long-term goals and trying\nto create an environment through my chosen organization and work field where knowledge\nand excellence are given their due.\n\nSheetal J. Patil Resume\n\n\x0cFAVORABLE PERSONALITY TRAITS\nCommitment to work, adaptability, goal oriented person, problem-solving abilities,\nComfortable with teamwork, good coordination and persuasion skills.\n\nPERSONAL DETAILS\nDate of Birth\n\n: 1st Nov 1975\n\nMarital Status\n\n: Single\n\nCategory\n\n: General\n\nNationality\n\n: Indian\n\nCurrent Status\n\n: Post Doctorate Fellow\nMicroelectronics Group\nDepartment of Electrical Engineering,\nIndian Institute of Technology (I.I.T) Bombay,\nPowai, Mumbai 400 076, INDIA\n\nPresent Address\n\n: Hostel No. 11, Room No. 233\nIIT \xe2\x80\x93 Bombay, Mumbai - 400076\n\nPermanent Address : 6th lane, Jaymala nagar, Near Ambi Hospital\nSangavi, Pune-411 027,\nPhone: +91-20-2728 5130\nLanguages Known\n\n: English , Hindi & Marathi\n\nHobbies\n\n: Reading, singing, traveling & watching movies\n\nIndoor games\n\n: Chess, Carom, Cards\n\nE-mail\n\n: sheetal@ee.iitb.ac.in, sheetu_pa@yahoo.co.in\n\nSheetal J. Patil Resume\n\n\x0cREFERENCES\nProf. V. Ramgopal Rao\nMicroelectronics branch\nDepartment of Electrical Engineering\nIndian Institute of technology, Bombay\nPowai, Mumbai, INDIA\nE- mail: rrao@ee.iitb.ac.in\nProf. Rakesh Lal\nMicroelectronics branch\nDepartment of Electrical Engineering\nIndian Institute of technology, Bombay\nPowai, Mumbai, INDIA\nEmail: rlal@ee.iitb.ac.in\nProf. (Ms.) S. A. Gangal\nDepartment of Electronics Science\nUniversity of Pune, Pune 411 007\nINDIA\nEmail: sag@electronics.unipune.ernet.in\n\nSheetal J. Patil Resume'