sentences:  The name Scanning Capacitance Microscopy was first used to describe a quality control tool for the RCA/CED (Capacitance Electronic Disc), a video disk technology that was a predecessor of the DVD.It has since been adapted for use in combination with scanned probe microscopes for measuring other systems and materials with semiconductor doping profiling being the most prevalent.SCM applied to semiconductors uses an ultra-sharp conducting probe (often Pt/Ir or Co/Cr thin film metal coating applied to an etched silicon probe) to form a metal-insulator-semiconductor (MIS/MOS) capacitor with a semiconductor sample if a native oxide is present.