sentences:  Another advantage of the trench capacitor is that its structure is under the layers of metal interconnect, allowing them to be more easily made planar, which enables it to be integrated in a logic-optimized process technology, which have many levels of interconnect above the substrate.The fact that the capacitor is under the logic means that it is constructed before the transistors are.This allows high-temperature processes to fabricate the capacitors, which would otherwise be degrading the logic transistors and their performance.