sentences:  The model was first published in 1965 by Bruce Deal and Andrew Grove of Fairchild Semiconductor, building on Mohamed M. Atalla's work on silicon surface passivation by thermal oxidation at Bell Labs in the late 1950s.This served as a step in the development of CMOS devices and the fabrication of integrated circuits.The model assumes that oxidation reaction occurs at the interface between the oxide layer and the substrate material, rather than between the oxide and the ambient gas.