*  Exposure Controls/Personal Protection  *
Respiratory Protection:HALF MASK RESPIRATOR
Ventilation:LOCAL EXHAUST TO MAINTN BELOW TLV.
Other Protective Equipment:FULL PROTECTIVE CLOTHING,SAFETY SHOWER,EYE
    WASH STATION
Supplemental Safety and Health
*  Product Identification  *
Product ID:HEXAMETHYLDISILAZANE
*  Composition/Information on Ingredients  *
Ingred
    Name:HEXAMETHYDISILAZANE(HMDS);1,1,1,3,3,3-HEXAMETHYLDISILAZANE;CAS
*  Hazards Identification  *
Effects of Overexposure:INH:EXCSSV INH CAUSES RESP TRACT IRRIT;ING:MAY
    CAUSE GI UPSET,VOMITG;SKIN/EYE:IRRITANT.MAY BURN SEVR
*  First Aid Measures  *
First Aid:INHAL:RMV TO FRESH AIR.IF NEEDED,GIVE CPR/OXYGEN.GET
    MD;INGEST:GIVE SEVRL GL OF WATER.DO NOT INDUCE VOMITG.IMMED GET
*  Fire Fighting Measures  *
Lower Limits:0.8
Extinguishing Media:POWDER,ALCOHOL RESISTANT FOAM,WATER SPRAY OR CARBON
    DIOXIDE
    PROT.CLTHG.
Unusual Fire/Explosion Hazard:ABOVE FLASH POINT,VAP-AIR MIXTURES ARE
    EXPLOSIVE WITHIN FLAMMABLE LIMITS.
*  Accidental Release Measures  *
Spill Release Procedures:VENTILATE & EVAC AREA.USE PROTCTV CLOTHG &
    RESP PROTCTION FM VAP.CONTAIN & RECOVR LIQ WHEN POSS.SPILLS MAY BE
    ABSORBD W/INERT MATL & COLLECTD FOR DISPOSAL.DIKE LG SPILL W/DRY
    SAND/EARTH & RECVR LIQ FO R RECOVERY WHEN POSSIBLE.REMOVE IGNITION
    SOURCES.
*Handling and Storage  *
Handling and Storage Precautions:PROTCT AGAINST PHYSICAL DAMAGE.STORE
    IN COOL,DRY WELL VNTLTD AREA AWAY FM IGN/HEAT SOURCES,OXIDZG
    MATL.OUTSIDE OR DETACHED STORAGE IS PREFERRED.
Other Precautions:KEEP AWAY FROM HEAT,SPARKS,FLAMES.KEEP CONTNRS
    CLOSED.USE W/ADEQUATE VENT.AVOID BRTHG MIST.WASH THOROUGHLY AFTER
    HNDLG.BOND GROUND CONTNRS WHEN TRNSFRG MATERL.USE NON-SPARKG TYPE
    TOOL & EQUIP.
    FORMULA:(CH*3)*3SINSI(CH*3)*3; SOLUBILITY IN WATER:HYDROLYSES
    SLOWLY AT ROOM TEMPERATURE.
*  Physical/Chemical Properties  *
HCC:F3
Vapor Density:4.6
Evaporation Rate & Reference:<1.0(ETHER=1)
Solubility in Water:NEGLIGIBLE
Appearance and Odor:CLEAR,COLORLESS LIQUID.AMMONIACAL ODOR.
*  Stability and Reactivity Data  *
Stability Indicator/Materials to Avoid:YES
WATER,METHYL ALCOHOL,ACIDS,STRONG ALKALIES & OXIDIZING AGNTS
Stability Condition to Avoid:HEAT, IGNITION SOURCES
Hazardous Decomposition Products:MAY FORM SILICON DIOXIDE,OXIDES OF C &
    N; NH*3/HCHO IF HEATD
*  Disposal Considerations  *
Waste Disposal Methods:COLLECT SPILLED MATL AS HAZARDOUS WASTE &
    ATOMIZE IN A SUITABLE RCRA APPROVED COMBUSTION CHAMBER OR DISPOSE
    OF IN A RCRA APPROVED FACILITY.DO NOT FLUSH TO SEWER! ENSURE
    COMPLIANCE WITH LOCAL,STATE & F EDERAL REGULATIONS.
