Applied Materials Confidential 1

FishBone

Diagram for DSA Particle

Small Particle 0.08um

Wafer Quality,

Metrology & Protocol

Wafer pre-measurement

Counts Particles are consistent  with tool test conditions

Hardware

Clean and replace

Quartz window

Clean, replace and run

without shadow Ring

Inspect lift assembly

Robot/Aligner/Reflectometer

Cleanliness

Laser, Process &

System Setup

Check laser melt/threshold,

Coordinate & syscon

Check particle

Recipe

Pyro setup

Check Gas flow Clean Heater lower

assembly

Wafer Handoff

Check Slit valve  door and O-ring

Replace Quartz window &

O-rings

EDX)

ICMPS on ball type

particles

Backside Particles

FOUP cleanliness & Wafer

transfer sequence

Oxide particle wafer  & metrology recipe

Si pitting

Check for visible laser

burn marks

